Invention Application
- Patent Title: SENSOR
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Application No.: US16815148Application Date: 2020-03-11
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Publication No.: US20210063432A1Publication Date: 2021-03-04
- Inventor: Akira FUJIMOTO , Hideyuki TOMIZAWA , Akiko YUZAWA , Naofumi NAKAMURA
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Priority: JP2019-155985 20190828
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
According to one embodiment, a sensor includes a base body, a first movable structure body, and a first fixed structure body. The first movable structure body includes first movable electrodes. A direction from the base body toward the first movable electrodes is aligned with a first direction. A distance between the base body and the plurality of first movable electrodes is changeable. A direction from one of the first movable electrodes toward an other one of the first movable electrodes is aligned with a second direction crossing the first direction. The first fixed structure body includes first fixed electrodes. One of the first fixed electrodes is between the one of the first movable electrodes and the other one of the first movable electrodes. A first movable electrode length along the first direction is shorter than a first fixed electrode length along the first direction.
Public/Granted literature
- US11460482B2 Sensor with fixed and movble components Public/Granted day:2022-10-04
Information query
IPC分类: