Invention Application
- Patent Title: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
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Application No.: US16842252Application Date: 2020-04-07
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Publication No.: US20210036010A1Publication Date: 2021-02-04
- Inventor: JAERYONG SIM , JONGSEON AHN , JEEHOON HAN
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR SUWON-SI
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR SUWON-SI
- Priority: KR10-2019-0094346 20190802
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11519 ; H01L27/11524 ; H01L27/11529 ; H01L27/11556 ; H01L27/11565 ; H01L27/1157 ; H01L27/11573 ; H01L23/522

Abstract:
A semiconductor memory device includes horizontal patterns disposed on a peripheral circuit structure and spaced apart from each other in a first direction. Memory structures are disposed on the horizontal patterns. The memory structures include source structures and electrode structures. A division structure is disposed between adjacent horizontal patterns in the first direction and is configured to separate the source structures of adjacent memory structures from each other. An etch stop pattern is disposed between the horizontal patterns at a level lower than a level of the source structures. The etch stop pattern is connected to a lower portion of the division structure.
Information query
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