Invention Application
- Patent Title: SYMMETRIC TUNNEL FIELD EFFECT TRANSISTOR
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Application No.: US15794526Application Date: 2017-10-26
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Publication No.: US20180053828A1Publication Date: 2018-02-22
- Inventor: Mohit BAJAJ , Suresh GUNDAPANENI , Aniruddha KONAR , Narasimha R. Mavilla , Kota V.R.M. MURALI , Edward J. NOWAK
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/786 ; H01L21/02 ; H01L29/78 ; H01L29/772 ; H01L29/739 ; H01L29/66 ; H01L29/267 ; H01L29/24 ; H01L29/08 ; H01L29/06 ; H01L21/8234 ; H01L21/8232 ; H01L21/3115

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a symmetric tunnel field effect transistor and methods of manufacture. The structure includes a gate structure including a source region and a drain region both of which comprise a doped VO2 region.
Public/Granted literature
- US10164027B2 Symmetric tunnel field effect transistor Public/Granted day:2018-12-25
Information query
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