Invention Application
- Patent Title: MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
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Application No.: US15636702Application Date: 2017-06-29
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Publication No.: US20180002167A1Publication Date: 2018-01-04
- Inventor: Tobias Frischmuth , Guenter Denifl , Thomas Grille , Ursula Hedenig , Markus Kahn , Daniel Maurer , Ulrich Schmid , Michael Schneider
- Applicant: Infineon Technologies AG
- Priority: DE102016111909.1 20160629
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H04R19/04 ; G01Q60/24 ; H04R19/02 ; B81B3/00 ; G01L1/00

Abstract:
A micromechanical structure in accordance with various embodiments may include: a substrate; and a functional structure arranged at the substrate; wherein the functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region; and wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa.
Public/Granted literature
- US10710874B2 Micromechanical structure and method for manufacturing the same Public/Granted day:2020-07-14
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