- 专利标题: Magnetoresistive random access memory and method for fabricating the same
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申请号: US18113070申请日: 2023-02-23
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公开(公告)号: US12127413B2公开(公告)日: 2024-10-22
- 发明人: Kun-Ju Li , Tai-Cheng Hou , Hsin-Jung Liu , Fu-Yu Tsai , Bin-Siang Tsai , Chau-Chung Hou , Yu-Lung Shih , Ang Chan , Chih-Yueh Li , Chun-Tsen Lu
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: TW 8123743 2019.07.05
- 分案原申请号: US16531108 2019.08.04
- 主分类号: H10B61/00
- IPC分类号: H10B61/00 ; G11C11/16 ; H01F10/32 ; H01F41/34 ; H10N50/01 ; H10N50/80
摘要:
A semiconductor device includes a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, a first ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ, a passivation layer on the first ULK dielectric layer, and a second ULK dielectric layer on the passivation layer. Preferably, the first ULK dielectric layer includes a first thickness, the passivation layer between the first MTJ and the second MTJ includes a second thickness, the passivation layer on top of the first MTJ includes a third thickness, and the second thickness is greater than the third thickness
公开/授权文献
- US20230200088A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2023-06-22
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