- 专利标题: Method of fabricating semiconductor device
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申请号: US17830811申请日: 2022-06-02
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公开(公告)号: US11923298B2公开(公告)日: 2024-03-05
- 发明人: Hyun-Seung Song , Kwang-Young Lee , Jonghyun Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Muir Patent Law, PLLC
- 优先权: KR 20200026158 2020.03.02
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L21/768 ; H10B10/00 ; H01L29/78
摘要:
A semiconductor device includes a first active pattern on a substrate; a first gate electrode crossing the first active pattern; source/drain patterns in an upper portion of the first active pattern and at opposite sides, respectively, of the first gate electrode; a first gate capping pattern on the first gate electrode; an interlayer insulating layer on the source/drain patterns; first and second active contacts penetrating the interlayer insulating layer and being respectively connected to the pair of source/drain patterns; and a first interconnection layer on the first and second active contacts. The first interconnection layer may include a first insulating structure covering a top surface of the second active contact; and a first interconnection line covering a top surface of the first active contact and extending on the first insulating structure, and covering a top surface of the first gate capping pattern between the first and second active contacts.
公开/授权文献
- US20220302017A1 METHOD OF FABRICATING SEMICONDUCTOR DEVICE 公开/授权日:2022-09-22
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