- 专利标题: Laterally diffused metal oxide semiconductor structure and method for manufacturing the same
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申请号: US17152955申请日: 2021-01-20
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公开(公告)号: US11830932B2公开(公告)日: 2023-11-28
- 发明人: Budong You , Hui Yu , Meng Wang , Yicheng Du , Chuan Peng , Xianguo Huang
- 申请人: Silergy Semiconductor Technology (Hangzhou) LTD
- 申请人地址: CN Hangzhou
- 专利权人: Silergy Semiconductor Technology (Hangzhou) LTD
- 当前专利权人: Silergy Semiconductor Technology (Hangzhou) LTD
- 当前专利权人地址: CN Hangzhou
- 优先权: CN 1810514863.9 2018.05.25
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/40 ; H01L29/06 ; H01L29/10 ; H01L29/78
摘要:
A laterally diffused metal oxide semiconductor structure can include: a base layer; a source region and a drain region located in the base layer; first dielectric layer located on a top surface of the base layer and adjacent to the source region; a voltage withstanding layer located on the top surface of the base layer and located between the first dielectric layer and the drain region; a first conductor at least partially located on the first dielectric layer; and a second conductor at least partially located on the voltage withstanding layer, where the first and second conductors are spatially isolated, and a juncture region of the first dielectric layer and the voltage withstanding layer is covered by one of the first and second conductors.
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