- 专利标题: Interconnect structure and manufacturing method for the same
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申请号: US17567525申请日: 2022-01-03
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公开(公告)号: US11817384B2公开(公告)日: 2023-11-14
- 发明人: Shuen-Shin Liang , Ken-Yu Chang , Hung-Yi Huang , Chien Chang , Chi-Hung Chuang , Kai-Yi Chu , Chun-I Tsai , Chun-Hsien Huang , Chih-Wei Chang , Hsu-Kai Chang , Chia-Hung Chu , Keng-Chu Lin , Sung-Li Wang
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT LAW
- 代理商 Anthony King
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L21/768
摘要:
The present disclosure provides an interconnect structure and a method for forming an interconnect structure. The method for forming an interconnect structure includes forming a bottom metal line in a first interlayer dielectric layer, forming a second interlayer dielectric layer over the bottom metal line, exposing a top surface of the bottom metal line, increasing a total surface area of the exposed top surface of the bottom metal line, forming a conductive via over the bottom metal line, and forming a top metal line over the conductive via.
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