Invention Grant
- Patent Title: Surface finishes with low rBTV for fine and mixed bump pitch architectures
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Application No.: US16177022Application Date: 2018-10-31
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Publication No.: US11488918B2Publication Date: 2022-11-01
- Inventor: Kristof Darmawaikarta , Robert May , Sashi Kandanur , Sri Ranga Sai Boyapati , Srinivas Pietambaram , Steve Cho , Jung Kyu Han , Thomas Heaton , Ali Lehaf , Ravindranadh Eluri , Hiroki Tanaka , Aleksandar Aleksov , Dilan Seneviratne
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; H01L23/522 ; H01L21/768

Abstract:
Embodiments described herein include electronic packages and methods of forming such packages. An electronic package includes a package substrate, first conductive pads formed over the package substrate, where the first conductive pads have a first surface area, and second conductive pads over the package substrate, where the second conductive pads have a second surface area greater than the first surface area. The electronic package also includes a solder resist layer over the first and second conductive pads, and a plurality of solder resist openings that expose one of the first or second conductive pads. The solder resist openings of the electronic package may include conductive material that is substantially coplanar with a top surface of the solder resist layer. The electronic package further includes solder bumps over the conductive material in the solder resist openings, where the solder bumps have a low bump thickness variation (BTV).
Information query
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