发明授权
- 专利标题: Semiconductor device having stacked transistor pairs and method of forming same
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申请号: US16441725申请日: 2019-06-14
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公开(公告)号: US11244949B2公开(公告)日: 2022-02-08
- 发明人: Pieter Weckx , Juergen Boemmels , Julien Ryckaert
- 申请人: IMEC vzw
- 申请人地址: BE Leuven
- 专利权人: IMEC vzw
- 当前专利权人: IMEC vzw
- 当前专利权人地址: BE Leuven
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 优先权: EP18178065 20180615
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L27/11 ; G11C5/02 ; G11C5/06 ; G11C11/412 ; H01L21/822 ; H01L21/8238
摘要:
The disclosed technology generally relates to semiconductor devices and more particularly to a semiconductor device comprising stacked complementary transistor pairs. In one aspect, a semiconductor device comprises first and second sets of transistors comprising a pass transistor and a stacked complementary transistor pair of a lower transistor and an upper transistor, wherein first transistor comprises a semiconductor channel extending along a horizontal first fin track, and each second transistor comprises a semiconductor channel extending along a second fin track parallel to the first fin track, and wherein the semiconductor channels of the pass transistors and of the lower transistors are arranged at a first level and the semiconductor channels of said upper transistors are arranged at a second level, a first tall gate electrode forming a common gate for the first complementary transistor pair and arranged along a horizontal first gate track, and a first short gate electrode forming a gate for the first pass transistor and arranged along a second gate track, a second tall gate electrode forming a common gate for the second complementary transistor pair and arranged along the second gate track, a second short gate electrode forming a gate for the second pass transistor and arranged along the first gate track, first and second contact arrangements forming a common drain contact for the transistors of the first set and the second set, respectively, and first and second cross-couple contacts extending horizontally between and interconnecting the first tall gate electrode and the second contact arrangement, and the second tall gate electrode and the first contact arrangement, respectively.
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