- 专利标题: Metallization lines on integrated circuit products
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申请号: US16103372申请日: 2018-08-14
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公开(公告)号: US11233006B2公开(公告)日: 2022-01-25
- 发明人: Ruilong Xie , Lars Liebmann , Daniel Chanemougame , Geng Han
- 申请人: GLOBALFOUNDRIES U.S. Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Hoffman Warnick LLC
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/528 ; H01L23/522 ; H01L21/02 ; H01L29/40 ; H01L21/8238 ; H01L27/092 ; H01L27/088 ; H01L21/8234
摘要:
An integrated circuit product includes a first layer of insulating material including a first insulating material. The first layer of insulating material is positioned above a device layer of a semiconductor substrate. The device layer includes transistors. A metallization blocking structure is positioned in an opening in the first layer of insulating material. The metallization blocking structure includes a second insulating material that is different from the first insulating material. A metallization trench is defined in the first layer of insulating material on opposite sides of the metallization blocking structure. A conductive metallization line includes first and second portions positioned in the metallization trench on opposite sides of the metallization blocking structure. The conductive metallization line has a long axis extending along the first and second portions.
公开/授权文献
- US20190006232A1 METALLIZATION LINES ON INTEGRATED CIRCUIT PRODUCTS 公开/授权日:2019-01-03
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