- 专利标题： Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
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申请号： US16448147申请日： 2019-06-21
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公开(公告)号： US10971331B2公开(公告)日： 2021-04-06
- 发明人: Shinji Sakamoto , Kenichi Yasui , Chiaki Inaba , Hikaru Yamamura , Satoru Fukushima , Yoshinori Akahane
- 申请人： NuFlare Technology, Inc.
- 申请人地址： JP Yokohama
- 专利权人： NuFlare Technology, Inc.
- 当前专利权人： NuFlare Technology, Inc.
- 当前专利权人地址： JP Yokohama
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JPJP2018-135232 20180718
- 主分类号： H01J37/317
- IPC分类号： H01J37/317 ; H01J37/302 ; H01J37/04 ; H01J37/147 ; H01J37/10
摘要：
In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.
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