公开(公告)号：US20200051782A1

公开(公告)日：2020-02-13

申请号：US16448147

申请日：2019-06-21

申请人： NuFlare Technology, Inc.

发明人： Shinji SAKAMOTO ,  Kenichi Yasui ,  Chiaki Inaba ,  Hikaru Yamamura ,  Satoru Fukushima ,  Yoshinori Akahane

IPC分类号： H01J37/317 ,  H01J37/04 ,  H01J37/147 ,  H01J37/10 ,  H01J37/302

摘要： In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.

公开(公告)号：US10971331B2

公开(公告)日：2021-04-06

申请号：US16448147

申请日：2019-06-21

申请人： NuFlare Technology, Inc.

发明人： Shinji Sakamoto ,  Kenichi Yasui ,  Chiaki Inaba ,  Hikaru Yamamura ,  Satoru Fukushima ,  Yoshinori Akahane

IPC分类号： H01J37/317 ,  H01J37/302 ,  H01J37/04 ,  H01J37/147 ,  H01J37/10

摘要： In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.