- 专利标题: Three-dimensional memory device with drain-select-level isolation structures and method of making the same
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申请号: US16388054申请日: 2019-04-18
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公开(公告)号: US10943917B2公开(公告)日: 2021-03-09
- 发明人: Takaaki Iwai , Makoto Koto , Sayako Nagamine , Ching-Huang Lu , Wei Zhao , Yanli Zhang , James Kai
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: The Marbury Law Group, PLLC
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11519 ; H01L21/762 ; H01L27/11565 ; H01L27/11556
摘要:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, and memory pillar structures extending through the alternating stack. Each of the memory pillar structures includes a respective memory film and a respective vertical semiconductor channel. Dielectric cores contact an inner sidewall of a respective one of the vertical semiconductor channels. A drain-select-level isolation structure laterally extends along a first horizontal direction and contacts straight sidewalls of the dielectric cores at a respective two-dimensional flat interface. The memory pillar structures may be formed on-pitch as a two-dimensional periodic array, and themay drain-select-level isolation structure may cut through upper portions of the memory pillar structures to minimize areas occupied by the drain-select-level isolation structure.
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