- 专利标题: Die tray with channels
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申请号: US15806822申请日: 2017-11-08
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公开(公告)号: US10796936B2公开(公告)日: 2020-10-06
- 发明人: Cyprian Emeka Uzoh
- 申请人: Invensas Bonding Technologies, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/673 ; H01L21/02 ; H01L23/00 ; H01L25/065 ; H01L25/00
摘要:
Representative implementations of devices and techniques provide a device and a technique for processing integrated circuit (IC) dies. The device comprises a die tray (such as a pick and place tray, for example) for holding the dies during processing. The die tray may include an array of pockets sized to hold individual dies. The technique can include loading dies on the die tray, cleaning the top and bottom surfaces of the dies, and ashing and activating both surfaces of the dies while on the die tray, eliminating the need to turn the dies over during processing.
公开/授权文献
- US20180182654A1 Die tray with channels 公开/授权日:2018-06-28
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