Invention Grant
- Patent Title: Semiconductor device
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Application No.: US15286055Application Date: 2016-10-05
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Publication No.: US10553713B2Publication Date: 2020-02-04
- Inventor: Yuki Nakano
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2011-263035 20111130
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L29/78 ; H01L29/417 ; H01L29/06 ; H01L29/16 ; H01L29/10 ; H01L29/423 ; H01L29/08 ; H01L29/04

Abstract:
The present invention provides a semiconductor device that can achieve both low on-resistance and high withstand voltage, while reducing the device size, improving the manufacturing yield, and reducing the cost. The semiconductor device 1 includes a substrate 5, an epitaxial layer 6 formed on the substrate 5 and formed with a gate trench 11, a gate insulating film 17 formed on the side surface 14 and the bottom surface 15 of the gate trench 11, a gate electrode 20 embedded in the gate trench 11 and opposed to the epitaxial layer 6 with the gate insulating film 17 therebetween, and a source layer 25, a channel layer 26, and a drift layer 27 formed in this order from a first surface to a second surface of the epitaxial layer 6, in which the on-resistance Ron represented by a variable “y” and the withstand voltage Vb represented by a variable “x” functionally satisfy the following relational expression (1): y≤9×10−7x2−0.0004x+0.7001 (1).
Public/Granted literature
- US20170025529A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-01-26
Information query
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