Invention Grant
- Patent Title: Transistor structure and semiconductor layout structure
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Application No.: US15879929Application Date: 2018-01-25
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Publication No.: US10381351B2Publication Date: 2019-08-13
- Inventor: Ching-Chia Huang , Tseng-Fu Lu , Wei-Ming Liao
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/108 ; H01L29/423 ; H01L29/06 ; H01L29/78

Abstract:
The present disclosure provides a transistor structure and a semiconductor layout structure. The transistor structure includes an active region, a buried gate structure disposed in the active region, a plurality of first dielectric layers disposed over sidewalls of the buried gate structure, and a source/drain region disposed in the active region at two opposite sides of the buried gate structure. In some embodiments, the buried gate structure includes a first portion and a second portion perpendicular to the first portion. In some embodiments, the buried gate structure is separated from the source/drain region by the first dielectric layers as viewed in a top view.
Public/Granted literature
- US20190198502A1 TRANSISTOR STRUCTURE AND SEMICONDUCTOR LAYOUT STRUCTURE Public/Granted day:2019-06-27
Information query
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