Invention Grant
- Patent Title: Model based measurement systems with improved electromagnetic solver performance
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Application No.: US14947510Application Date: 2015-11-20
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Publication No.: US10345095B1Publication Date: 2019-07-09
- Inventor: Stilian Ivanov Pandev , Leonid Poslavsky , Dzmitry Sanko , Andrei V. Shchegrov
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA- Tencor Corporation
- Current Assignee: KLA- Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Spano Law Group
- Agent Joseph S. Spano
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B11/02 ; G01B21/08 ; H01L21/66 ; G01N21/95 ; G01N21/88 ; G01N21/64

Abstract:
Methods and systems for solving measurement models of complex device structures with reduced computational effort are presented. In some embodiments, a measurement signal transformation model is employed to compute transformed measurement signals from coarse measurement signals. The transformed measurement signals more closely approximate a set of measured signals than the coarse measurement signals. However, the coarse set of measured signals are computed with less computational effort than would be required to directly compute measurement signals that closely approximate the set of measured signals. In other embodiments, a measurement signal transformation model is employed to compute transformed measurement signals from actual measured signals. The transformed measurement signals more closely approximate the coarse measurement signals than the actual measured signals. Transformed measurement signals are subsequently used for regression, library generation, or other analyses typically employed as part of an effort to characterize structural, material, and process parameters in semiconductor manufacturing.
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