- 专利标题: Dishing prevention dummy structures for semiconductor devices
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申请号: US15964572申请日: 2018-04-27
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公开(公告)号: US10340357B2公开(公告)日: 2019-07-02
- 发明人: Yi-Huan Chen , Chien-Chih Chou , Ta-Wei Lin , Fu-Jier Fan , Kong-Beng Thei , Yi-Sheng Chen , Szu-Hsien Liu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L29/49
- IPC分类号: H01L29/49 ; H01L29/06 ; H01L29/40 ; H01L27/088 ; H01L21/8234
摘要:
In some embodiments, an integrated circuit is provided. The integrated circuit may include an inner ring-shaped isolation structure that is disposed in a semiconductor substrate. Further, the inner-ring shaped isolation structure may demarcate a device region. An inner ring-shaped well is disposed in the semiconductor substrate and surrounds the inner ring-shaped isolation structure. A plurality of dummy gates are arranged over the inner ring-shaped well. Moreover, the plurality of dummy gates are arranged within an interlayer dielectric layer.
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