Invention Grant
- Patent Title: System and method for laser-sustained plasma illumination
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Application No.: US15274956Application Date: 2016-09-23
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Publication No.: US10257918B2Publication Date: 2019-04-09
- Inventor: Anant Chimmalgi , Sebaek Oh , Joshua Wittenberg , Lauren Wilson , Rahul Yadav , Ilya Bezel , Michael Navone , Anatoly Shchemelinin
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G01N23/04 ; G02B6/02 ; F21V8/00 ; G02B27/14 ; G02B6/42 ; G02B6/028

Abstract:
An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.
Public/Granted literature
- US20170094765A1 System and Method for Laser-Sustained Plasma Illumination Public/Granted day:2017-03-30
Information query