- 专利标题: Vertical transistors and methods of forming same
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申请号: US15893860申请日: 2018-02-12
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公开(公告)号: US10256235B2公开(公告)日: 2019-04-09
- 发明人: Brent A. Anderson , Edward J. Nowak
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: US KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: US KY Grand Cayman
- 代理机构: Hoffman Warnick LLC
- 代理商 Anthony Canale
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L29/78 ; H01L29/10
摘要:
One aspect of the disclosure relates to an integrated circuit structure. The integrated circuit structure may include a fin having a first source/drain region and a second source/drain, the first source/drain region being over a substrate and below a central region of the fin, and the second source/drain region being within a dielectric layer and over the central region of the fin; a gate structure within the dielectric layer substantially surrounding the central region of the fin between the first source/drain region and the second source drain region, wherein the fin includes at least one tapered region from the central region of the fin to at least one of the first source/drain region or the second source/drain region.
公开/授权文献
- US20180175025A1 VERTICAL TRANSISTORS AND METHODS OF FORMING SAME 公开/授权日:2018-06-21
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