- 专利标题: Semiconductor device and manufacturing method
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申请号: US15823414申请日: 2017-11-27
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公开(公告)号: US10256229B2公开(公告)日: 2019-04-09
- 发明人: Tatsuya Naito
- 申请人: FUJI ELECTRIC CO., LTD.
- 申请人地址: JP Kanagawa
- 专利权人: FUJI ELECTRIC CO., LTD.
- 当前专利权人: FUJI ELECTRIC CO., LTD.
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2015-241757 20151211; JP2016-180011 20160914
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; H01L29/78 ; H01L29/08 ; H01L29/739 ; H01L29/74 ; H01L29/66 ; H01L29/06 ; H01L29/40 ; H01L27/07
摘要:
It is aimed to realize both of reserving a channel formation region and suppressing a latch-up. A semiconductor device is provided, including: a semiconductor substrate; a plurality of trench portions provided at a front surface side of the semiconductor substrate, each of which has a portion extending in an extending direction; and a first conductivity-type emitter region and a second conductivity-type contact region provided between adjacent two trench portions and exposed on a front surface of the semiconductor substrate alternately in the extending direction, wherein on the front surface of the semiconductor substrate, a length of the emitter region at a central position between the two trench portions is shorter than a length of the emitter region at portions contacting the trench portions, and on the front surface of the semiconductor substrate, at least a part of a boundary of the emitter region has a curved shape.
公开/授权文献
- US20180082996A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD 公开/授权日:2018-03-22
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