知搜-全球专利检索

  1. 登录
  2. 注册
发明公开
CN107810547A 利用LED加热的静电夹具 有权

利用LED加热的静电夹具
摘要：
本发明揭示一种利用LED加热的静电夹具。所述利用LED加热的静电夹具包括包含LED加热器的第一子组合件和包括静电夹具的第二子组合件。所述LED衬底加热器子组合件包含具有凹部的基底。多个发光二极管LED安置在所述凹部内。所述LED可为GaN或GaP LED，其在容易由硅吸收的波长处发光，因此有效且快速地加热所述衬底。包括静电夹具的所述第二子组合件安置在所述LED衬底加热器子组合件上。所述静电夹具包含在由所述LED发射的所述波长处为透明的顶部电介质层和内部层。一或多个电极安置于所述顶部电介质层与所述内部层之间以形成所述静电力。
摘要（英）：

An electrostatic chuck with LED heating is disclosed. The electrostatic chuck with LED heating comprises a first subassembly, which comprises a LED heater, and a second subassembly, which comprises anelectrostatic chuck. The LED substrate heater subassembly includes a base having a recessed portion. A plurality of light emitting diodes (LEDs) is disposed within the recessed portion. The LEDs maybe GaN or GaP LEDs, which emit light at a wavelength which is readily absorbed by silicon, thus efficiently and quickly heating the substrate. The second subassembly, which comprises an electrostaticchuck, is disposed on the LED substrate heater subassembly. The electrostatic chuck includes a top dielectric layer and an interior layer that are transparent at the wavelength emitted by the LEDs. One or more electrodes are disposed between the top dielectric layer and the interior layer to create the electrostatic force.

公开/授权文献
0/0