The invention discloses a silicon wafer handing-over precision control device, a silicon wafer adsorption bench, a silicon wafer transmission system and a silicon wafer handing-over method. The silicon wafer handing-over precision control device comprises a friction pad having a rough surface for making contact with the silicon wafer, a spring unit and a micro stroke unit arranged between the friction pad and the spring unit. When the micro stroke unit is subjected to downward gravity, the spring unit is compressed to deform. Compared with the prior art, the silicon wafer handing-over precision control device can solve the problem of precision out of control in the silicon wafer handing-over process and ensures silicon wafer handing-over precision.