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发明授权
CN101241866B 具有加强物的凸块结构的制造方法 有权

具有加强物的凸块结构的制造方法
摘要：
本发明公开了一种具有加强物的凸块结构的制造方法。提供一基板，而基板具有多个接垫与一保护层，其中保护层具有多个开口，且各开口分别暴露出相对应的接垫的一部分。在基板上形成一球底金属材料层，以覆盖保护层与保护层所暴露出的接垫。在球底金属材料层上形成多个凸块，其中各凸块的底面积小于开口的底面积。在各凸块周围的球底金属材料层上形成一加强物，其中各加强物分别与凸块接触，且加强物的材质为一聚合物。图案化球底金属材料层，以形成多个球底金属层，其中各球底金属层的底面积大于开口的底面积。因此，此种凸块具有平坦的顶面，可以改善现有技术所具有的城墙效应。
摘要（英）：

The invention discloses a manufacturing method of a lug structure withe reinforcement. A substrate is provided, which has a plurality of connecting pad and a protective layer, wherein, the protective layer has a plurality of opening and each opening exposes a part of the relative connecting pad. A ball bottom metal material layer is formed on the substrate to cover the protective layer and the connecting pad exposed by the protective layer. A plurality lugs are formed on the ball bottom metal material layer. The area of bottom of each lug is less than the area of bottom of the opening. The ball bottom metal material layer around each lug is provided with a reinforcement, wherein each reinforcement is contacted with the lug. The material of the reinforcement is a polymer. The ball bottom metal material layer is patterned to form a plurality of ball bottom metal layers. The area of bottom of each ball bottom metal layer is less than the area of bottom of the opening. Therefore, the lug has a flat top surface and improves the city wall effect of the prior technology.

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