Piezoelectric microelectromechanical system microphone with optimized output capacitance

    公开(公告)号:US12101601B2

    公开(公告)日:2024-09-24

    申请号:US17929071

    申请日:2022-09-01

    IPC分类号: H04R17/02

    CPC分类号: H04R17/02 H04R2201/003

    摘要: A microelectromechanical system microphone includes a piezoelectric diaphragm, upper inner electrodes and upper outer electrodes disposed on an upper surface of the diaphragm, and lower inner electrodes and lower outer electrodes disposed on a lower surface of the diaphragm. The diaphragm is divided into a plurality of sectors, a first of the sectors including an inner and an outer upper electrode physically disconnected from an inner and an outer upper electrode on a second sector adjacent to the first sector, and an inner and an outer lower electrode physically disconnected from an inner and an outer lower electrode on the second sector. A first via extends between and electrically couples the upper and lower inner electrodes of the first sector and a first bond pad. A second via extends between and electrically couples the upper and lower outer electrodes of the second sector and a second bond pad.

    Ultrasonic sensor
    3.
    发明授权

    公开(公告)号:US12038541B2

    公开(公告)日:2024-07-16

    申请号:US17650206

    申请日:2022-02-07

    申请人: DENSO CORPORATION

    摘要: An ultrasonic sensor includes an adhesion sensor including a variable capacitance and a fixed capacitance. The variable capacitance includes a sensor electrode provided on a first surface of a bottom having a microphone installed thereon and a capacitance value thereof changes in accordance with adhesion of foreign matter on the first surface. The fixed capacitance includes a first electrode connected to the sensor electrode, and a second electrode provided on a member different from a microphone housing and disposed facing the first electrode. The adhesion sensor further includes an adhesion detecting section that is connected to the sensor electrode via the fixed capacitance and detects adhesion of foreign matter to the first surface by supplying an alternating-current signal to the fixed capacitance and the variable capacitance.

    Piezoelectric device
    5.
    发明授权

    公开(公告)号:US11979713B2

    公开(公告)日:2024-05-07

    申请号:US17853979

    申请日:2022-06-30

    IPC分类号: H04R17/02 H10N30/853

    CPC分类号: H04R17/02 H10N30/8542

    摘要: A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.

    Extension structures in piezoelectric microelectromechanical system microphones

    公开(公告)号:US11979712B2

    公开(公告)日:2024-05-07

    申请号:US17810359

    申请日:2022-07-01

    IPC分类号: H04R17/02

    CPC分类号: H04R17/02 H04R2201/003

    摘要: A piezoelectric microelectromechanical system microphone comprises a frame, a film of piezoelectric material including slits defining a plurality of independently displaceable piezoelectric elements within an area defined by a perimeter of the frame, bases of the plurality of piezoelectric elements mechanically secured to the frame, tips of the plurality of piezoelectric elements being free to be displaced in a direction perpendicular to a plane defined by the frame responsive to impingement of sound waves on the plurality of piezoelectric elements, and edge extensions extending from edges of the plurality of piezoelectric elements in the direction perpendicular to the plane defined by the frame to reduce a 3 dB roll-off frequency of the piezoelectric microelectromechanical system microphone.

    Detection and analysis of percussive sounds

    公开(公告)号:US11972772B2

    公开(公告)日:2024-04-30

    申请号:US17349605

    申请日:2021-06-16

    摘要: A system is disclosed for detecting and correlating percussive sounds with previously identified spectral signatures of a plurality of events so as to notify a user of an occurrence of a particular event. The system may include a sensor component which includes a piezoelectric transducer at a periphery of the sensor component for coupling with a surface and converting percussive sounds from the surface into an electrical signal. The sensor component may also include a local processor configured to produce a data signal based on the electrical signal, and a communication device for sending the data signal to a remote processor. The system may also include a remote processor configured to receive the data signal and compare the data signal to at least one reference signal and send a notification to a user based at least in part on the data signal correlating to at least one reference signal.

    Low power always-on microphone using power reduction techniques

    公开(公告)号:US11955993B2

    公开(公告)日:2024-04-09

    申请号:US17114087

    申请日:2020-12-07

    申请人: INVENSENSE, INC.

    发明人: Michael Perrott

    摘要: An audio activity detector device is disclosed. The audio activity detector device comprises a closed loop feedback regulating circuit that supplies an input signal representative of a time-varying voltage signal to a quantizer circuit, wherein the quantizer circuit, as a function of the input signal, converts the input signal to a quantizer discrete-time signal; a first circuit that, as a function of the discrete-time signal, determines a key quantizer statistic value for the quantizer discrete-time signal; and a second circuit that, as a function of the key quantizer statistic value, determines a signal statistic value for the input signal and a gain control value.

    PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEM MICROPHONE

    公开(公告)号:US20240098426A1

    公开(公告)日:2024-03-21

    申请号:US18370017

    申请日:2023-09-19

    摘要: A piezoelectric microelectromechanical system microphone has a piezoelectric sensor layer with at least two sensing electrodes and at least one piezoelectric layer. Each piezoelectric layer can deform and generate an electrical potential responsive to impingement of sound waves on the piezoelectric layer. The sensing electrodes and the at least one piezoelectric layer form a stacked electrode structure. Each sensing electrode is disposed on or below a corresponding piezoelectric layer and senses the generated electrical potential. At least one of the sensing electrodes can include first corrugations which are configured such to release residual stress and to improve sensitivity of the microelectromechanical system microphone.

    Microphone
    10.
    发明授权

    公开(公告)号:US11924608B2

    公开(公告)日:2024-03-05

    申请号:US17816013

    申请日:2022-07-29

    IPC分类号: H04R1/46 H04R17/02 H04R17/10

    CPC分类号: H04R1/46 H04R17/025 H04R17/10

    摘要: The present disclosure provides a microphone, comprising a shell structure, a vibration pickup assembly, a vibration pickup assembly, wherein the vibration pickup assembly is accommodated in the shell structure and generates vibration in response to an external sound signal transmitted to the shell structure, and at least two acoustoelectric conversion elements configured to respectively receive the vibration of the vibration pickup assembly to generate an electrical signal, wherein the at least two acoustoelectric conversion elements have different frequency responses to the vibration of the vibration pickup assembly.