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公开(公告)号：US12228435B2
公开(公告)日：2025-02-18
申请号：US17013968
申请日：2020-09-08
Applicant: Ichor Systems, Inc.
Inventor： Daniel T. Mudd , Patti J. Mudd
Abstract: In one embodiment, a method for delivering a gas at a predetermined rate includes providing a gas flow control apparatus comprising a gas flow path extending from a gas inlet to a gas outlet, a proportional valve coupled to the gas flow path, an on/off valve coupled to the gas flow path, a volume being defined between the proportional valve and the on/off valve, and a flow restrictor having a flow impedance located downstream of the proportional valve. The volume is pressurized with the gas to a target set point by opening the proportional valve while the on/off valve is in an off state. Finally, the on/off valve is moved to the on state, delivering gas to the gas outlet.
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公开(公告)号：US20250035227A1
公开(公告)日：2025-01-30
申请号：US18916977
申请日：2024-10-16
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
Abstract: An apparatus includes a mounting panel having a plurality of diffusion-bonded metal plates that form: a reservoir to contain a process fluid; and multiple channels through which to flow the process fluid, wherein at least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel and is in fluid communication with the reservoir through one of a plurality of vias formed in the mounting panel.
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公开(公告)号：US12203497B2
公开(公告)日：2025-01-21
申请号：US17996137
申请日：2021-04-12
Applicant: PITTWAY SARL
Inventor： Petr Kusala , Jiri Vechet , Petr Svejnoha
Abstract: A mounting clip includes a valve unit housing and a flange. The actuator unit has an actuator unit housing and a shoulder. The mounting clip has first sections positioned in first level, that are straight and run parallel to each other within the first level and are configured to be inserted into grooves provided at the shoulder. A second section is positioned in a second level, is U-shaped, and is configured to be inserted into a recess provided at the flange. Third sections extend between each of the first sections and the second section, each of the third sections has first subsections being bent, a second subsection being bent, and a third subsection being straight or angled. The first subsections extend between the first sections and the third subsections. The second subsections extend between the second section and the third sub-sections.
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公开(公告)号：US20250003401A1
公开(公告)日：2025-01-02
申请号：US18759318
申请日：2024-06-28
Applicant: Delavan AG Pumps, Inc.
Inventor： Logan CIPALA , Matt JOHNSON , David BEAUDRY
Abstract: A diaphragm pump such as a three-chamber diaphragm pump includes a head having an inlet port and an outlet port and defining an inlet side including inlet chambers; and an outlet side having a center outlet chamber. Each of the inlet chambers includes an associated inlet valve. A single shutoff valve controlling fluid flow to the center outlet chamber and a single bypass valve in fluid communication between the center outlet chamber and the inlet side. The single shutoff valve has a plunger with an oval cross-section extending into the center outlet chamber. The single shutoff valve and the single bypass valve have adjustable pressure set points that are adjustable independently of one another.
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公开(公告)号：US20240426390A1
公开(公告)日：2024-12-26
申请号：US18828958
申请日：2024-09-09
Applicant: SCHUKRA BERNDORF GMBH
Inventor： Sigurd STURM , Gerhard HOERBER , Daniel SCHMITZ
Abstract: A valve includes a housing with a bottom plate, first and second fluid ports, and an actuator component arranged such that the bottom plate engages the actuator component. The actuator component includes a carrier, a plunger arranged on the carrier and comprising a sealing surface, a shape memory alloy actuator arranged co-linearly with the plunger between the carrier and the plunger to exert an actuation force onto the plunger, and a spring co-linearly arranged with the plunger between the carrier and the plunger to exert a bias force onto the plunger. The sealing surface of the plunger can sealingly engage the first fluid port. The valve further includes a circuit board comprising circuitry to actuate the shape memory alloy actuator. The housing is at least partly arranged between the circuit board and carrier and comprises through holes to receive electrical pins of the actuator component extending towards the circuit board.
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Patent Agency Ranking
公开(公告)号：US12173807B2
公开(公告)日：2024-12-24
申请号：US18124126
申请日：2023-03-21
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
Abstract: A system includes a mounting panel having diffusion-bonded metal plates that form a reservoir to contain a process fluid, multiple channels through which to flow the process fluid, and vias through which to flow the process fluid to and from process fluid control components attached to the mounting panel. At least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel, the temperature sensor in fluid communication with the reservoir through one of the vias. A set of inlet ports are attached to the mounting panel, the set of inlet ports to receive the process fluid. At least one outlet port is attached to the mounting panel, the at least one outlet port to output the process fluid from the mounting panel.
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公开(公告)号：US12158208B2
公开(公告)日：2024-12-03
申请号：US17909136
申请日：2021-01-14
Applicant: NIPPON PILLAR PACKING CO., LTD.
Inventor： Kiyotaka Ohmae , Masashi Katanaya
Abstract: A flow passage unit 1 includes a base plate 2 and a plurality of fluid devices 3 provided on the base plate 2. The plurality of fluid devices 3 include a first fluid device 31 having a first flow passage hole 31b, and a second fluid device 32 having a second flow passage hole 32b. The first fluid device 31 is disposed on an upper side of the base plate 2 and detachably provided on the base plate 2, and the second fluid device 32 is disposed on a lower side of the base plate 2 and detachably provided on the base plate 2. The base plate 2 has a first through hole 21 formed so as to penetrate the base plate 2 in a thickness direction of the base plate 2 to provide communication between the first flow passage hole 31b and the second flow passage hole 32b.
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公开(公告)号：US20240347349A1
公开(公告)日：2024-10-17
申请号：US18638589
申请日：2024-04-17
Applicant: Lam Research Corporation
Inventor： John Folden Stumpf , Damien Long , Norman Nakashima , Karl Frederick Leeser
CPC classification number: H01L21/67017 , F16K27/003
Abstract: In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-delivery component outlet port formed within a body of the gas-primitive substrate. At least one first pair of bore holes comprising a gas-flow path is formed on an upstream side and a downstream side, respectively, of the location of the gas-delivery component. Other apparatuses and systems are disclosed.
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公开(公告)号：US20240328523A1
公开(公告)日：2024-10-03
申请号：US18681993
申请日：2021-08-09
Applicant: Carten Controls Limited
Inventor： Declan IRISH , Lee CAULFIELD
CPC classification number: F16K11/22 , F16K7/04 , F16K27/003
Abstract: A pinch valve assembly is provided comprising a single piece block comprising one or more internal channels within the block for distribution of fluids, each of the one or more channels comprising an embedded sealable barrier, the single piece block further comprising one or more outlets for connection of one or more fluid conduits to the channels.
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公开(公告)号：US12085185B2
公开(公告)日：2024-09-10
申请号：US17904852
申请日：2021-02-02
Applicant: SCHUKRA BERNDORF GMBH
Inventor： Sigurd Sturm , Gerhard Hoerber , Daniel Schmitz
CPC classification number: F16K27/003 , F03G7/06143 , F03G7/064 , F16K31/02 , B60N2/665 , B60N2/914 , F16K31/025
Abstract: Various examples relate to electrically actuated valves. Various examples relate to actuators to be used for valves, e.g., shape—memory alloy actuators or solenoid actuators (151) or piezoelectric actuators. Various examples relate to a modular concept in which a valve can be formed by attaching an actuator component (601) to a housing. Various examples relate to a further modular concept in which multiple valve blocks, each valve block including one or more valves, can be fluidly coupled with each other.
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