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公开(公告)号：US11624450B2
公开(公告)日：2023-04-11
申请号：US17244557
申请日：2021-04-29
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
Abstract: An apparatus comprises a mounting panel including a top plate having multiple vias and multiple orifices. An internal face of the top plate includes a first cut-out region and channels through which to flow a process fluid. The first cut-out region can be a reservoir in which to contain the process fluid. The multiple vias are adapted for passing the process fluid through the top plate. The multiple orifices are adapted for attaching a plurality of process fluid control components to the mounting panel. An inner plate also has multiple additional vias. The apparatus includes a bottom plate, where the inner plate is compacted between the top plate and the bottom plate to form an integral metallic body in which to contain and flow the process fluid.
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公开(公告)号：US20230288007A1
公开(公告)日：2023-09-14
申请号：US18181959
申请日：2023-03-10
Applicant: Applied Materials, Inc.
Inventor： Daemian Raj Benjamin Raj , Kiran Garikipati , Kurt R. Langeland , Syed A. Alam
CPC classification number: F16L41/03 , G05D11/132 , B01F25/43 , B01F2101/58
Abstract: Exemplary modular gas blocks may include a body having inlet and outlet ends. The body may define a portion of a first gas path along a length of the body and may define a second gas path along a width of the body. The first gas path may include channel segments defined within the body. The inlet end may define a gas inlet that is coupled with the first gas path. The body may define first fluid ports that are coupled with the first gas path. A fluid port of the first fluid ports may be coupled with the gas inlet. The first fluid ports may be coupled with one another via a respective channel segment. An upper surface may define a lateral fluid port that is spaced apart from a first fluid port along the width and is coupled with the first fluid port via the second gas path.
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Patent Agency Ranking
公开(公告)号：US20230220923A1
公开(公告)日：2023-07-13
申请号：US18124126
申请日：2023-03-21
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
CPC classification number: F15B13/0817 , F15B13/0892 , F15B19/005
Abstract: A system includes a mounting panel having diffusion-bonded metal plates that form a reservoir to contain a process fluid, multiple channels through which to flow the process fluid, and vias through which to flow the process fluid to and from process fluid control components attached to the mounting panel. At least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel, the temperature sensor in fluid communication with the reservoir through one of the vias. A set of inlet ports are attached to the mounting panel, the set of inlet ports to receive the process fluid. At least one outlet port is attached to the mounting panel, the at least one outlet port to output the process fluid from the mounting panel.
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公开(公告)号：US20220349489A1
公开(公告)日：2022-11-03
申请号：US17244557
申请日：2021-04-29
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
Abstract: An apparatus comprises a mounting panel including a top plate having multiple vias and multiple orifices. An internal face of the top plate includes a first cut-out region and channels through which to flow a process fluid. The first cut-out region can be a reservoir in which to contain the process fluid. The multiple vias are adapted for passing the process fluid through the top plate. The multiple orifices are adapted for attaching a plurality of process fluid control components to the mounting panel. An inner plate also has multiple additional vias. The apparatus includes a bottom plate, where the inner plate is compacted between the top plate and the bottom plate to form an integral metallic body in which to contain and flow the process fluid.
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公开(公告)号：US20250035227A1
公开(公告)日：2025-01-30
申请号：US18916977
申请日：2024-10-16
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
Abstract: An apparatus includes a mounting panel having a plurality of diffusion-bonded metal plates that form: a reservoir to contain a process fluid; and multiple channels through which to flow the process fluid, wherein at least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel and is in fluid communication with the reservoir through one of a plurality of vias formed in the mounting panel.
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公开(公告)号：US12173807B2
公开(公告)日：2024-12-24
申请号：US18124126
申请日：2023-03-21
Applicant: Applied Materials, Inc.
Inventor： Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
Abstract: A system includes a mounting panel having diffusion-bonded metal plates that form a reservoir to contain a process fluid, multiple channels through which to flow the process fluid, and vias through which to flow the process fluid to and from process fluid control components attached to the mounting panel. At least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel, the temperature sensor in fluid communication with the reservoir through one of the vias. A set of inlet ports are attached to the mounting panel, the set of inlet ports to receive the process fluid. At least one outlet port is attached to the mounting panel, the at least one outlet port to output the process fluid from the mounting panel.
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公开(公告)号：US20230139688A1
公开(公告)日：2023-05-04
申请号：US17514430
申请日：2021-10-29
Applicant: Applied Materials, Inc.
Inventor： Daemian Raj Benjamin Raj , Kiran Garikipati , Syed A. Alam , Kurt R. Langeland
IPC: B01F5/06
Abstract: Exemplary modular gas delivery assemblies may include a plurality of modular gas blocks coupled together. Each gas block may include an upper portion and a lower portion. A first end of the upper portion may extend beyond a first end of the lower portion and a second end of the lower portion may extend beyond a second end of the upper portion. A first fluid channel may include a first fluid port, a second fluid port, and a third fluid port. The block body may define a second fluid channel that extends transversely to the first fluid channel. A first modular gas block may be coupled with a second modular gas block and a third modular gas block such that the first fluid channels of each of the first, second, and third modular gas blocks are fluidly coupled with one another.
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