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公开(公告)号：US20240347349A1
公开(公告)日：2024-10-17
申请号：US18638589
申请日：2024-04-17
Applicant: Lam Research Corporation
Inventor： John Folden Stumpf , Damien Long , Norman Nakashima , Karl Frederick Leeser
CPC classification number: H01L21/67017 , F16K27/003
Abstract: In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-delivery component outlet port formed within a body of the gas-primitive substrate. At least one first pair of bore holes comprising a gas-flow path is formed on an upstream side and a downstream side, respectively, of the location of the gas-delivery component. Other apparatuses and systems are disclosed.
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公开(公告)号：US11996301B2
公开(公告)日：2024-05-28
申请号：US17603214
申请日：2020-04-14
Applicant: Lam Research Corporation
Inventor： John Folden Stumpf , Damien Long , Norman Nakashima , Karl Frederick Leeser
CPC classification number: H01L21/67017 , F16K27/003
Abstract: In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-delivery component outlet port formed within a body of the gas-primitive substrate. At least one first pair of bore holes comprising a gas-flow path is formed on an upstream side and a downstream side, respectively, of the location of the gas-delivery component. Other apparatuses and systems are disclosed.
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公开(公告)号：US20220199431A1
公开(公告)日：2022-06-23
申请号：US17603214
申请日：2020-04-14
Applicant: Lam Research Corporation
Inventor： John Folden Stumpf , Damien Long , Norman Nakashima , Karl Frederick Leeser
Abstract: In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-delivery component outlet port formed within a body of the gas-primitive substrate. At least one first pair of bore holes comprising a gas-flow path is formed on an upstream side and a downstream side, respectively, of the location of the gas-delivery component. Other apparatuses and systems are disclosed.
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