SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES

    公开(公告)号:US20250062143A1

    公开(公告)日:2025-02-20

    申请号:US18233788

    申请日:2023-08-14

    Abstract: A load lock including a substrate support device for supporting a substrate, and an indexer coupled to the substrate support device. The substrate support device may take measurements and acquire data to verify features of the supported substrate and an associated manufacturing system. Substrate features that are measured include, substrate temperature, substrate warping, and a substrate presence, absence, or misplacement on the support device. System features that are measured include system vibrations and substrate transfer mechanism calibration data. The substrate support device sensors and communications circuits can be integrated into the substrate support device, through use of an additive manufacturing process in making the substrate support device.

    SYSTEMS AND METHODS FOR CONTINUOUS FLOW CONTROL OF PRINTABLE MATERIAL IN ADDITIVE MANUFACTURING

    公开(公告)号:US20250050577A1

    公开(公告)日:2025-02-13

    申请号:US18926427

    申请日:2024-10-25

    Applicant: Voltera Inc.

    Abstract: Provided is a print head, a system and method for pressure measurements and continuous control of a flowable material in a flow path. The system includes a pressure coupler comprising a body having a channel through the longitudinal center of the body, the channel spanning between a first opening and a second opening. The pressure coupler includes a membrane embedded in the body, wherein the membrane is contiguous with, and forms a region of, the channel. Material flowing through the channel imparts a force on the membrane, and the force is transferred from the membrane to a pressure sensor adjacent to the pressure coupler. The pressure coupler and sensor may be included in a print head, whereby the pressure of a flowable material is measured during dispensing from the print head. The pressure measurements are used for continuous feedback flow control of the flowable material through the flow path.

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