公开(公告)号：US07268384B2

公开(公告)日：2007-09-11

申请号：US11292028

申请日：2005-12-01

申请人： Kunal R. Parekh ,  Byron N. Burgess

发明人： Kunal R. Parekh ,  Byron N. Burgess

IPC分类号： H01L29/17 ,  H01L27/84 ,  H01L27/75 ,  H01L27/85 ,  H01L27/86 ,  H01L27/88 ,  H01L27/90 ,  H01L27/91 ,  H01L27/97

CPC分类号： H01L21/76897 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76895 ,  H01L27/10814 ,  H01L27/10855 ,  H01L27/10888 ,  H01L27/10894 ,  Y10S257/905 ,  Y10S257/906 ,  Y10S257/907

摘要： The invention includes methods of forming memory circuitry. In one implementation, a semiconductor substrate includes a pair of word lines having a bit node received therebetween. A bit node contact opening is formed within insulative material over the bit node. Sacrificial plugging material is formed within the bit node contact opening between the pair of word lines. Sacrificial plugging material is removed from the bit node contact opening between the pair of word lines, and it is replaced with conductive material that is in electrical connection with the bit node. Thereafter, the conductive material is formed into a bit line.

摘要翻译： 本发明包括形成存储器电路的方法。 在一个实施方案中，半导体衬底包括一对在其间接收的位节点的字线。 在位节点上的绝缘材料内形成位节点接触开口。 牺牲性封堵材料形成在一对字线之间的位节点接触开口内。 牺牲性封堵材料从一对字线对之间的位节点接触开口移除，并由与位节点电连接的导电材料代替。 之后，将导电材料形成为位线。

公开(公告)号：US6051446A

公开(公告)日：2000-04-18

申请号：US58623

申请日：1998-04-09

申请人： Paul M. Moore ,  Rashid Bashir

发明人： Paul M. Moore ,  Rashid Bashir

IPC分类号： G02F1/1335 ,  G02F1/1339 ,  G02F1/1343 ,  H01L21/00 ,  H01L27/84

CPC分类号： G02F1/13394 ,  G02F1/133553 ,  G02F1/134336

摘要： A liquid crystal transducer pixel cell includes support pillars separating a top and bottom plate of the cell. During the process for forming the pixel cell, the support pillars are formed prior to formation of the pixel electrode. This process flow obviates the need for depositing a thick dielectric layer on top of the pixel electrode. This process flow also prevents exposure of the surface of the pixel electrode to etching during subsequent processing, preserving the reflectance of the pixel cell electrode. Finally, the process flow in accordance with the present invention eliminates the creation of keyhole voids within the support pillars by forming the support pillars over a flat upper level intermetal dielectric rather than over narrow trenches formed in the pixel electrode layer.

摘要翻译： 液晶转换器像素单元包括分离单元的顶板和底板的支撑柱。 在形成像素单元的过程中，在形成像素电极之前形成支撑柱。 该工艺流程消除了在像素电极的顶部上沉积厚电介质层的需要。 该工艺流程还防止像素电极的表面在随后的处理期间暴露于蚀刻，从而保持像素单元电极的反射率。 最后，根据本发明的工艺流程通过在平坦的上层金属间电介质上而不是在形成在像素电极层中的窄沟槽之上形成支撑柱来消除在支撑柱内产生锁孔的空洞。