公开(公告)号：US06559454B1

公开(公告)日：2003-05-06

申请号：US09763546

申请日：2001-05-29

Applicant: Adrian John Murrell ,  Erik Jan Hilda Collart ,  Bernard Francis Harrison ,  Amir Al-Bayati ,  Chris James Burgess ,  David Armour ,  Andrew Holmes ,  Simon Povall ,  Drew Arnold ,  Paul Anthony Burfield

Inventor： Adrian John Murrell ,  Erik Jan Hilda Collart ,  Bernard Francis Harrison ,  Amir Al-Bayati ,  Chris James Burgess ,  David Armour ,  Andrew Holmes ,  Simon Povall ,  Drew Arnold ,  Paul Anthony Burfield

IPC: H01J3715

CPC classification number: H01J27/022 ,  H01J2237/08 ,  H01J2237/31701

Abstract: An ion beam generation apparatus comprising an ion source (20) for generating ions, and a tetrode extraction assembly (11) comprising four electrodes for extracting and accelerating ions from the ion source. The extraction assembly comprises a source electrode (22) at the potential of the ion source, an extraction electrode (23) adjacent to the source electrode to extract ions from the ion source (20), a ground electrode (25), and a suppression electrode (24) between the extraction electrode and the ground electrode. Each electrode has an aperture to allow the ion beam to pass therethrough. The gap between the extraction (23) and suppression (24) electrodes is variable in the direction of ion beam travel.

Abstract translation: 一种离子束产生装置，包括用于产生离子的离子源（20）和四极提取组件（11），其包括用于从离子源提取和加速离子的四个电极。 提取组件包括位于离子源电位的源电极（22），与源电极相邻的提取电极（23），用于从离子源（20）提取离子，接地电极（25）和抑制 提取电极和接地电极之间的电极（24）。 每个电极具有允许离子束通过的孔。 提取（23）和抑制（24）电极之间的间隙在离子束行进方向上是可变的。

公开(公告)号：US06501078B1

公开(公告)日：2002-12-31

申请号：US09527031

申请日：2000-03-16

Applicant: Geoffrey Ryding ,  Theodore H. Smick ,  Marvin Farley ,  Takao Sakase

Inventor： Geoffrey Ryding ,  Theodore H. Smick ,  Marvin Farley ,  Takao Sakase

IPC: H01J3715

CPC classification number: H01J37/15 ,  H01J37/08 ,  H01J49/28 ,  H01J2237/31701

Abstract: An ion electrode extraction assembly comprising an ion source 20 and at least one electrode 50 having a gap through which a beam of extracted ions passes in use. An electrode manipulator assembly 55 is provided to move the electrode so as to vary the width of the gap transversely to the ion beam, move the electrode transversely to the ion beam, and move the electrode in the direction of the ion beam. The three degrees of movement being carried out independently of one another.

Abstract translation: 一种离子电极提取组件，其包括离子源20和至少一个具有间隙的电极50，所提取的离子束在使用中通过该间隙通过。 提供电极操纵器组件55以移动电极，以便横向于离子束改变间隙的宽度，将电极横向于离子束移动，并且沿着离子束的方向移动电极。 三个运动方式彼此独立地进行。