公开(公告)号：US20040188607A1

公开(公告)日：2004-09-30

申请号：US10751907

申请日：2004-01-07

Inventor： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J037/05

CPC classification number: H01J37/05 ,  H01J37/153 ,  H01J37/28

Abstract: An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

Abstract translation: 本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。 扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场 在与包含狭缝的表面形成对称镜的位置处。 该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。

公开(公告)号：US20040188613A1

公开(公告)日：2004-09-30

申请号：US10807116

申请日：2004-03-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Kazutoshi Kaji ,  Yoshifumi Taniguchi ,  Shigeto Isakozawa

IPC: H01J037/26 ,  H01J037/05

CPC classification number: H01J37/1471 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic prism to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic prism, and a control unit for controlling the exciting conditions of the deflection coils.

Abstract translation: 扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。 该电子显微镜还包括设置在磁性棱镜的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量过滤器，偏转线圈用于校正 由磁性棱镜形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。

公开(公告)号：US20030098414A1

公开(公告)日：2003-05-29

申请号：US10258486

申请日：2002-10-25

Inventor： Stephan Uhlemann ,  Maximilian Haider

IPC: H01J037/05

CPC classification number: H01J37/05 ,  H01J49/46 ,  H01J2237/2602 ,  H01J2237/2823

Abstract: The invention relates to an electron/ion gun for electron or ion beams, comprising a beam source and a monochromator. According to the invention, said monochromator is equipped with an additional beam guidance system and a switchover element which conveys the particles coming from the beam source to either the monochromator or the rest of the beam guidance system is provided at the input of the monochromator.

Abstract translation: 本发明涉及一种用于电子或离子束的电子/离子枪，包括光束源和单色仪。 根据本发明，所述单色仪配备有附加的光束引导系统和将来自光束源的粒子传送到单色仪或光束引导系统的其余部分的切换元件设置在单色仪的输入端。