公开(公告)号：US06771075B2

公开(公告)日：2004-08-03

申请号：US10173761

申请日：2002-06-19

申请人： Yoshiaki Aiki ,  Shunichi Takahashi

发明人： Yoshiaki Aiki ,  Shunichi Takahashi

IPC分类号： G01N2762

CPC分类号： G01N27/62

摘要： An air ion measuring device is provided which holds the air passage rate in an ion detector as constant as possible to provide for improved air ion measurement reliability, permits a size and thickness reduction and also a reduction of parts and cost of the ion detector, permits ready cleaning thereof, provides a measure for coping with static electricity, provides good visual recognition property in the air ion data display and displays data other than air ion data and error data. An ion detector structure is formed by disposing a charge collector electrode and repelling electrodes in the vicinity of opposite ends of the charge collector electrode on one side surface of an air passage, through which air is withdrawn from one end portion and exhausted from the other end portion, and disposing a further repelling electrode on the other side surface of the air passage.

摘要翻译： 提供一种空气离子测量装置，其保持离子检测器中的通气速率尽可能恒定，以提供改善的空气离子测量可靠性，允许尺寸和厚度减小以及离子检测器的部件和成本的降低，允许 提供了对静电的应对措施，在空气离子数据显示中提供良好的视觉识别特性，并显示除气体离子数据和错误数据之外的数据。 离子检测器结构通过在空气通道的一个侧表面上设置集电电极和排斥电极在集电极电极的相对端附近，通过该离子检测器结构从一端部抽出空气并从另一端排出 并且在所述空气通道的另一侧表面上设置另外的排斥电极。

公开(公告)号：US06541982B2

公开(公告)日：2003-04-01

申请号：US09760667

申请日：2001-01-17

申请人： Hideo Kitagawa ,  Nobumasa Suzuki

发明人： Hideo Kitagawa ,  Nobumasa Suzuki

IPC分类号： G01N2762

CPC分类号： G01R19/0061 ,  H05H1/0062

摘要： A plasma density measuring method which includes producing a surface wave at an interface between a dielectric member and a plasma, and measuring at least one of a plasma density and a relative change in plasma density, on the basis of the surface wave. A plasma processing system including a container having a window, and for storing therein a gas introduced thereinto, a dielectric member for closing the window of the container, a plasma voltage source for applying a high frequency voltage through the dielectric member to produce a plasma by use of the gas inside the container, wherein a predetermined process is performed by use of the thus produced plasma, a detecting system for detecting an electric field intensity distribution of a surface wave propagated through the dielectric member, and a feedback system for feeding back the result of detection by the detecting system, to determine a processing condition for the process.

摘要翻译： 一种等离子体密度测量方法，其包括在介电构件和等离子体之间的界面处产生表面波，并且基于表面波测量等离子体密度和等离子体密度的相对变化中的至少一个。 一种等离子体处理系统，包括具有窗口的容器，并且其中存储有引入其中的气体，用于封闭容器窗口的电介质构件，用于通过电介质构件施加高频电压以产生等离子体的等离子体电压源 使用容器内部的气体，其中通过使用由此产生的等离子体执行预定处理，用于检测通过电介质构件传播的表面波的电场强度分布的检测系统，以及用于反馈 由检测系统检测的结果，以确定该过程的处理条件。

公开(公告)号：US06531877B1

公开(公告)日：2003-03-11

申请号：US09961715

申请日：2001-09-24

申请人： Mahmoud Abdel-Rahman

发明人： Mahmoud Abdel-Rahman

IPC分类号： G01N2762

CPC分类号： G01N27/70 ,  G01N30/64 ,  G01N2030/642

摘要： An ionization detector includes a unique combination of elements including a non-radioactive glow discharge source, a gas flow area designed to promote mixing of sample gas with a reagent gas, a GC column interface which directs air leaks away from the sample area, and a signal electrode designed to discriminate against ion collection. This embodiment includes a body defining a detector cavity and a sample flow area. A plurality of electrodes are disposed within the body including a glow discharge source having a first and second discharge electrode located near one end of the body, a guard electrode located longitudinally intermediate to the discharge electrode and the sample flow area, and a signal electrode disposed within a signal electrode cavity located near an end opposite to the guard electrode. A column interface depends from the body, in communication with the sample flow area. The column interface includes a reagent inlet and a purge outlet which extend laterally from a longitudinal portion of the column interface. A column from a GC extends through the longitudinal portion and is partially disposed within the sample flow area.

摘要翻译： 电离检测器包括独特的元件组合，包括非放射性辉光放电源，设计用于促进样品气体与反应气体混合的气流区域，引导空气从样品区域泄漏的气相色谱柱界面，以及 信号电极设计用于区分离子收集。 该实施例包括限定检测器腔体和样品流动区域的主体。 多个电极设置在主体内，包括辉光放电源，该辉光放电源具有位于主体一端附近的第一和第二放电电极，位于放电电极纵向中间的保护电极和样品流动区域，以及设置的信号电极 位于靠近保护电极相对端的信号电极腔内。 柱体界面取决于身体，与样品流动区域通信。 柱接口包括从柱接口的纵向部分横向延伸的试剂入口和吹扫出口。 来自GC的柱延伸穿过纵向部分并且部分地设置在样品流动区域内。

公开(公告)号：US06414494B1

公开(公告)日：2002-07-02

申请号：US09548563

申请日：2000-04-13

申请人： Stephan E. Schmidt ,  Kristin Powers Goppel ,  Eric J. Carlson

发明人： Stephan E. Schmidt ,  Kristin Powers Goppel ,  Eric J. Carlson

IPC分类号： G01N2762

CPC分类号： F23D14/725 ,  F23D2208/10 ,  F23N5/123

摘要： In a flame ionization sensor type gas combustion control apparatus, the sensor tip, or probe, exposed to the flame is constructed and arranged according to materials and shapes which promote mechanical deformation of the sensor due to thermal expansion and contraction. The mechanical deformation will cause cracks to open in the contaminant layers surrounding the probe, enabling the sensor to perform as intended even though insulative contaminant build up is present.

公开(公告)号：US06291999B1

公开(公告)日：2001-09-18

申请号：US09163536

申请日：1998-09-30

申请人： Yasuhiro Nishimori ,  Michio Taniguchi ,  Kazuki Kondo

发明人： Yasuhiro Nishimori ,  Michio Taniguchi ,  Kazuki Kondo

IPC分类号： G01N2762

CPC分类号： H01J37/32174 ,  H01J37/32935 ,  H05H1/46

摘要： A plasma monitoring apparatus for monitoring a condition of plasma of a plasma load to which power is supplied from a high frequency power source through an impedance matcher provides with a first input impedance calculator for calculating an impedance as a first input impedance from a supply-side terminal of the matcher to the plasma load-side based on voltage, current and phase difference detected at the supply-side terminal of the matcher, a second input impedance calculator for calculating an impedance as a second input impedance from a load-side terminal of the matcher to the plasma load based on a impedance of a element of the matcher and the first input impedance and a plasma impedance calculator for calculating an impedance of the plasma load from the second input impedance and an impedance of a supply-side connecting the matcher and the plasma load.

摘要翻译： 一种等离子体监测装置，用于监测从高频电源通过阻抗匹配器供电的等离子体负载的等离子体状态，提供第一输入阻抗计算器，用于从供给侧计算作为第一输入阻抗的阻抗 基于在匹配器的供电侧端子处检测到的电压，电流和相位差，将匹配器的端子连接到等离子体负载侧;第二输入阻抗计算器，用于从负载侧端子计算作为第二输入阻抗的阻抗 基于匹配器的元件的阻抗和第一输入阻抗的等离子体负载的匹配器以及用于计算来自第二输入阻抗的等离子体负载的阻抗和连接匹配器的供给侧的阻抗的等离子体阻抗计算器 和等离子体负载。

公开(公告)号：US06661233B2

公开(公告)日：2003-12-09

申请号：US09978260

申请日：2001-10-15

申请人： Wenjun Yang ,  Peter C. Hsi

发明人： Wenjun Yang ,  Peter C. Hsi

IPC分类号： G01N2762

CPC分类号： G01N33/0032

摘要： A gas analysis system and method use foreground broadband gas monitoring and background selective gas analysis. The foreground broadband monitoring indicates concentrations of a class of chemicals or contaminants in a gas sample, provides real-time warnings of contaminants, and can activate the background selective analysis. Separate broadband detectors and gas analyzers can respectively perform broadband monitoring and selective analysis. To reduce system components, a broadband detector that performs broadband monitoring switches to measure concentrations of chemicals output from a separation device for the selective analysis.

公开(公告)号：US06462553B1

公开(公告)日：2002-10-08

申请号：US09530729

申请日：2000-07-11

申请人： Eugen Badura

发明人： Eugen Badura

IPC分类号： G01N2762

CPC分类号： G01R29/24

摘要： A device and a method for converting flow of charge into a frequency signal is proposed. The device comprises: two parallel circuit branches (Z; Z′) which are arranged to receive flow of charge alternately and each of which has a series arrangement of a switching element (40; 40′), an integrator (10; 10′) and a comparator (30; 30′), wherein the switching elements (40; 40′) serve to supply the flow of charge to one of the two circuit branches (Z; Z′) and in the receiving circuit branch (Z; Z′) the integrator (10; 10′) serves to integrate the flow of charge and is configured to be resettable and the comparator (30; 30′) is configured to emit a signal when the integrated flow of charge corresponds to a specific threshold value signal.

摘要翻译： 提出了一种用于将电荷流转换成频率信号的装置和方法。 该装置包括：两个并联的电路分支（Z; Z'），其被布置为交替地接收电荷流，并且每个具有开关元件（40; 40'）的串联布置，积分器（10; 10'） 以及比较器（30; 30'），其中所述开关元件（40; 40'）用于将电荷流提供给所述两个电路分支（Z; Z'）中的一个并且在所述接收电路分支（Z; Z' '）积分器（10; 10'）用于整合电荷流并被配置为可重置，并且比较器（30; 30'）被配置为当电荷积分对应于特定阈值时发出信号 信号。

公开(公告)号：US06433553B1

公开(公告)日：2002-08-13

申请号：US09428264

申请日：1999-10-27

申请人： Matthew J. Goeckner ,  Charles E. Van Wagoner

发明人： Matthew J. Goeckner ,  Charles E. Van Wagoner

IPC分类号： G01N2762

CPC分类号： H01J37/32412 ,  G01R19/0061 ,  H01J37/32935

摘要： In a plasma processing system, displacement current is removed from a current measurement by providing a secondary capacitor connected in parallel with a primary capacitor defined by an anode and a cathode spaced from one another within the plasma doping chamber. The secondary capacitor is chosen or adjusted to have a same or nearly the same capacitance as the primary capacitor. When a voltage pulse is applied to both the primary and secondary capacitors, the respective currents through the capacitors are measured. In order to remove the effects of the displacement current that is present at the leading and falling edges of the voltage pulse, and in order to measure the ion current within the doping chamber, the secondary current through the secondary capacitor is subtracted from the primary current through the primary capacitor.

摘要翻译： 在等离子体处理系统中，通过提供与由等离子体掺杂室内彼此隔开的阳极和阴极限定的主电容器并联连接的次级电容器，从电流测量中移除位移电流。 次级电容器被选择或调整为具有与初级电容器相同或几乎相同的电容。 当电压脉冲施加到初级和次级电容器时，测量通过电容器的相应电流。 为了消除存在于电压脉冲的前沿和下降沿的位移电流的影响，为了测量掺杂室内的离子电流，通过次级电容器的次级电流从初级电流中减去 通过初级电容。

公开(公告)号：US06426631B1

公开(公告)日：2002-07-30

申请号：US09560944

申请日：2000-04-28

申请人： Masahide Akiyama ,  Hiroshi Ono ,  Hitoshi Matsunosako

发明人： Masahide Akiyama ,  Hiroshi Ono ,  Hitoshi Matsunosako

IPC分类号： G01N2762

CPC分类号： G01N27/4071

摘要： An oxygen sensor device consisting a cylindrical tube of a ceramic solid electrolyte having an oxygen ion conducting property, a reference electrode formed on an inner surface of the cylindrical tube, and a measuring electrode formed on an outer surface of the cylindrical tube at a position at least opposed to the reference electrode, wherein a ceramic layer is formed on the outer surface of the cylindrical tube, the ceramic layer having an opening portion for exposing the surface of the measuring electrode and incorporating a heat-generating member therein, the heat-generating member being buried surrounding the opening portion. The oxygen sensor device as a whole has a cylindrical shape relaxing the concentration of thermal stress and exhibiting excellent thermal shock resistance. With the heat-generating member being buried near the sensing portion, the sensing portion is heated up to a predetermined activating temperature within short periods of time exhibiting an excellent sensor response.

摘要翻译： 一种氧传感器装置，包括具有氧离子传导性质的陶瓷固体电解质的圆柱形管，形成在圆柱形管的内表面上的参比电极和在圆柱形管的外表面上形成的测量电极 与参比电极相对，其中陶瓷层形成在圆柱形管的外表面上，陶瓷层具有用于暴露测量电极的表面的开口部分并且在其中并入发热元件，发热 围绕开口部分埋设构件。 氧传感器装置整体上具有缓和热应力集中的圆柱形状，并具有优异的耐热冲击性。 随着发热部件被埋在感测部分附近，感测部分在短时间内被加热到预定的激活温度，表现出良好的传感器响应。

公开(公告)号：US06333632B1

公开(公告)日：2001-12-25

申请号：US09397624

申请日：1999-09-16

申请人： Wenjun Yang ,  Peter C. Hsi

发明人： Wenjun Yang ,  Peter C. Hsi

IPC分类号： G01N2762

CPC分类号： G01N27/70

摘要： A discharge ionization detector (DID) includes a sensor that uses an alternating current (AC) discharge through a working gas as an ionization source. The sensor includes a discharge chamber, into which the working gas is introduced, and an ionization chamber, into which a sample gas is introduced. UV photons from the discharge chamber and metastable particles that enter the ionization chamber from the discharge chamber ionize molecules in the sample gas. The ions generated from the ionized sample gas are measured as a current indicating the quantity of ionizable molecules in the sample gas. For selective identification of molecules in the sample gas, one or more chemical filters can filter the sample gas to separate target gases from gases that interfere with detection of the target gases. Additionally, a supply for the working gas can change the working gas to change the maximum energy available for ionization of the sample gas. Thus, current measurements with different working gases indicate quantities of classes of molecules having different ionization potentials.

摘要翻译： 放电电离检测器（DID）包括使用通过工作气体的交流（AC）放电作为电离源的传感器。 该传感器包括：引入工作气体的排出室，以及导入样品气体的电离室。 来自放电室的紫外光子和从放电室进入电离室的亚稳颗粒电离样品气体中的分子。 从电离样品气体产生的离子被测量为表示样品气体中的可离子化分子的量的电流。 为了选择性地识别样品气体中的分子，一个或多个化学过滤器可以过滤样品气体，以将来自干扰检测目标气体的气体与目标气体分离。 此外，工作气体的供应可以改变工作气体以改变可用于样品气体电离的最大能量。 因此，使用不同工作气体的电流测量指示具有不同电离电位的分子的类别数量。