公开(公告)号：US06397495B1

公开(公告)日：2002-06-04

申请号：US09476072

申请日：1999-12-30

Applicant: Neil Doherty ,  Lawrence E. Zagar

Inventor： Neil Doherty ,  Lawrence E. Zagar

IPC: F26B1300

CPC classification number: B65H23/24 ,  B65H2406/112

Abstract: An air bar for steering a web of material has a hollow interior subjected to an air bar supply pressure. At least one air jet exit is connected to the hollow interior of the air bar. A metering device is assigned to the hollow interior of the air bar for varying the air pressured formed below the web of material for moving the web of material in a lateral direction.

Abstract translation: 用于转向材料网的空气棒具有经受气杆供应压力的中空内部。 至少一个喷气出口连接到气缸的中空内部。 计量装置被分配到空气棒的中空内部，用于改变形成在材料幅材下方的空气压力，用于在横向方向上移动材料幅材。

公开(公告)号：US06314660B1

公开(公告)日：2001-11-13

申请号：US09186784

申请日：1998-11-04

Applicant: John Dangelewicz ,  Steven W. Steinfield

Inventor： John Dangelewicz ,  Steven W. Steinfield

IPC: F26B1300

CPC classification number: F26B13/12 ,  H05K1/0393 ,  H05K3/0097 ,  H05K2203/0271 ,  H05K2203/1105 ,  H05K2203/1545

Abstract: A system and method for fabricating flexible circuits. The inventive system includes an oven and three or more independent tensioners for moving a strip of flex tape therethrough. In total, N tensioners are provided per side. The tensioners provide a cumulative tension force T on the tape and each tensioner applies T/N of the total tension. The tension is applied tangentially in a single plane of the tape along a direction parallel to the longitudinal axis thereof In the illustrative embodiment, the tensioners are sprocket wheels. Eight sprocket wheels are disposed on a supply side of the system and eight wheels are disposed on a take-up side of the system. The sprocket wheels are adapted to engage sprocket holes in the tape. The tape has a sprocket wheel area and a die area. A silicon die is typically bonded to the die area with a suitable epoxy. Copper conductors on the tape communicate electrical signals from a printer or other mechanism to the silicon die. The inventive system maintains high tension on the tape as it moves through a plurality of bake ovens. High tension is distributed over a longer area of the tape than with prior systems and is maintained without exposing the flex circuit to a stressful bend angle. In addition, each sprocket hole experiences minimal force due to the force/tension distribution methodology of the inventive system.

Abstract translation: 一种用于制造柔性电路的系统和方法。 本发明的系统包括一个烤箱和三个或更多个独立的张紧器，用于通过其移动柔性带条。 总共提供每侧N个张紧器。 张紧器在带上提供累积的张力T，并且每个张紧器施加总张力的T / N。 张力沿着平行于其纵向轴线的方向在带的单个平面中切向施加。在说明性实施例中，张紧器是链轮。 八个链轮设置在系统的供给侧，八个轮设置在系统的卷绕侧。 链轮适于啮合带中的链轮孔。 胶带具有链轮区域和模具区域。 硅模具通常用合适的环氧树脂结合到模具区域。 磁带上的铜导体将来自打印机或其他机构的电信号传送到硅芯片。 本发明的系统在带通过多个烘烤炉时保持高张力。 与现有系统相比，高张力分布在磁带的较长区域上，并且在不将柔性电路暴露于压力弯曲角度的情况下被维持。 此外，由于本发明系统的力/张力分布方法，每个链轮孔都受到极小的力。

公开(公告)号：US06775925B2

公开(公告)日：2004-08-17

申请号：US10276239

申请日：2003-04-14

Applicant: Steven J. Zagar ,  Paul Seidl ,  Jerry Packer ,  David Welter

Inventor： Steven J. Zagar ,  Paul Seidl ,  Jerry Packer ,  David Welter

IPC: F26B1300

CPC classification number: F26B13/104

Abstract: Apparatus and a method for the evaporative cooling of a web within a dryer in a compact manner. Excess fluid overspray is controlled, thereby avoiding problems with fluid depositing on internal surfaces of the dryer, which can cause mineral build-up and can result in web breaks or quality defects if fluid drips onto the web. More specifically, a water delivery system is used which directs a water mist to the web by appropriate design and placement of the spray nozzles. The quantity of water delivered to the web is regulated, and is preferably based upon web temperature. Excess mist is controlled by directing hot air to effectively vaporize the excess mist before it is able to contact the internal surfaces of the dryer enclosure and its internal components.

Abstract translation: 用于以紧凑的方式在干燥器内蒸发冷却纸幅的装置和方法。 控制过量的液体过喷，从而避免在干燥器的内表面上流体沉积的问题，这可能导致矿物质积聚，并且如果流体滴落到网上，则可能导致卷材断裂或质量缺陷。 更具体地，使用水输送系统，其通过适当地设计和放置喷嘴将水雾引导到幅材上。 调节向纸幅输送的水量，优选基于纸幅温度。 通过引导热空气来控制多余的雾气，以便在能够接触干衣机外壳及其内部部件的内表面之前有效地蒸发多余的雾气。

公开(公告)号：US06813846B2

公开(公告)日：2004-11-09

申请号：US10106029

申请日：2002-03-27

Applicant: Futoshi Yoshida

Inventor： Futoshi Yoshida

IPC: F26B1300

CPC classification number: G03D15/022 ,  F26B3/283 ,  F26B13/103

Abstract: A photosensitive material is dried by radiating heat from a guide plate, having high emissivity, which is disposed along a conveying path and is heated by a ceramic heater. Further, the photosensitive material is dried by a warm air, which is heated by a heater, blown onto the photosensitive material from nozzles. In the drying, because the warm air is also heated by the heated guide plate, the warm air can be risen to a predetermined temperature efficiently. Accordingly, because transferring the radiating heat and the blowing the warm air are performed at a same position (a same member), the drying can be performed efficiently without enlarging the device.

Abstract translation: 感光材料通过从具有高发射率的引导板辐射热而被干燥，该导热板沿传送路径设置并被陶瓷加热器加热。 此外，感光材料通过加热器加热的暖空气干燥，从喷嘴吹到感光材料上。 在干燥中，由于暖风也被加热的导向板加热，因此能够有效地将暖气升温至规定的温度。 因此，由于在相同的位置（相同的部件）进行散热和送风，所以可以有效地进行干燥，而不会扩大装置。

公开(公告)号：US06748672B2

公开(公告)日：2004-06-15

申请号：US10307105

申请日：2002-11-27

Applicant: Sung-Hee Lee ,  Sang-Wha Lee

Inventor： Sung-Hee Lee ,  Sang-Wha Lee

IPC: F26B1300

CPC classification number: H01L21/67034 ,  Y10S134/902

Abstract: A wafer dryer for use in a semiconductor cleaning apparatus includes an internal bath, an external bath, a solution supply line, a solution drain line, a pump, and drying means. The solution drain line has a first drain line and a second drain line. A pump for constantly maintaining a speed of a drained solution is installed on the first drain line. The drying means has an isopropyl alcohol (IPA) nozzle, a first gas spray nozzle for spraying N2 gas, and a second spray nozzle. The second spray nozzle is installed on all inner sidewalls of the external bath and has a plurality of holes. Thus, no wave is produced at a surface of the drained solution.

Abstract translation: 用于半导体清洁装置的晶片干燥器包括内部浴，外部浴，溶液供应管线，排液管线，泵和干燥装置。 排液管线具有第一排水管线和第二排水管线。 在第一排水管线上安装有用于不断保持排水溶液速度的泵。 干燥装置具有异丙醇（IPA）喷嘴，用于喷射N 2气体的第一气体喷嘴和第二喷嘴。 第二喷嘴安装在外部浴槽的所有内侧壁上，并具有多个孔。 因此，在排出的溶液的表面上不产生波。

公开(公告)号：US06742285B2

公开(公告)日：2004-06-01

申请号：US10352010

申请日：2003-01-27

Applicant: Robert R. Shepard

Inventor： Robert R. Shepard

IPC: F26B1300

CPC classification number: F26B21/004 ,  F26B15/12

Abstract: An air knife constructed in accordance with the present invention directs a curtain of air across a region and most typically is used to direct the stream of air against a surface. In an exemplary embodiment of the invention the air knife includes an elongated housing having an inlet for receiving air into the housing. The housing includes an elongated gap that extends along the housing that allows air entering the housing through the inlet to exit the housing and form a curtain of air. The elongated housing is made from a piece of sheet metal bent to define a hollow region into which air is forced. The sheet metal defines a gap along a length of the housing from which the air exits. The elongated air knife forms an angle with respect to a direction of travel of glass sheets passing the air knife so that a leading edge of those glass sheets passes progressively different parts of the air knife.

Abstract translation: 根据本发明构造的气刀指导空气横跨区域，最典型地用于将空气流引向表面。 在本发明的示例性实施例中，气刀包括具有用于将空气接收到壳体中的入口的细长壳体。 壳体包括沿着壳体延伸的细长间隙，其允许空气通过入口进入壳体以离开壳体并形成空气帘。 细长的壳体由弯曲的一块金属片制成，以限定空气被强制的中空区域。 金属板沿着壳体的长度限定出空隙，空气从该外壳排出。 细长的气刀相对于通过气刀的玻璃板的行进方向形成一角度，使得这些玻璃板的前缘逐渐通过气刀的不同部分。

公开(公告)号：US06757989B2

公开(公告)日：2004-07-06

申请号：US10183813

申请日：2002-06-26

Applicant: Jeong-Yong Bae ,  Chang-Ro Yoon ,  Pyeng-Jae Park

Inventor： Jeong-Yong Bae ,  Chang-Ro Yoon ,  Pyeng-Jae Park

IPC: F26B1300

CPC classification number: H01L21/67034

Abstract: An apparatus for drying a semiconductor substrate includes a chamber having a processing bath and a cover, a liquid flow system for supplying a liquid flow into the processing bath so as to clean the substrate and for draining a liquid from the processing bath, a gas distributor for spraying a gas for drying the substrate, and decompression means for exhausting air in the chamber.

Abstract translation: 用于干燥半导体衬底的设备包括具有处理槽和盖的室，用于将液体流供应到处理槽中以便清洁衬底并从处理槽排出液体的液体流动系统，气体分配器 用于喷射用于干燥基底的气体，以及用于排出腔室中的空气的减压装置。

公开(公告)号：US06701638B1

公开(公告)日：2004-03-09

申请号：US10130436

申请日：2002-05-15

Applicant: Antonio Polato

Inventor： Antonio Polato

IPC: F26B1300

CPC classification number: C14B1/58

Abstract: A machine for the conditioning of laminar flexible products such as industrial hides and skins, including at least one conditioning unit crossed by the products to be processed, blowers for blowing and extracting air directed toward products, and a series of air jets blowing simultaneously on both sides of the products under treatment in a transverse direction with respect to the advancement direction of the products. The products are caused to advance along a substantially horizontal plane by means of pairs of annular threads uniformly distributed across the useful width of the conditioning paths. The threads of each pair are placed on opposite sides and in contact with the products to support and transfer them along the path leaving their side surfaces substantially free. As an alternative, the advancement means are formed by pairs of endless belts in mutually facing relationship to firmly hold the products while permitting passage of blown air.

Abstract translation: 一种用于调节层状柔性产品如工业皮革和皮肤的机器，包括至少一个由待处理产品穿过的调节单元，用于吹送和提取朝向产品的空气的鼓风机以及同时在两者上同时吹送的一系列空气喷射器 在相对于产品的推进方向的横向方向处理的产品的侧面。 使产品通过均匀分布在调节路径的有用宽度上的成对的环形螺纹沿着基本水平的平面前进。 每对的螺纹被放置在相对侧并与产品接触以支撑和传送它们沿路径离开它们的侧表面基本上自由。 作为替代方案，推进装置由成对的相互面对的环形带形成，以在允许吹送空气通过的同时牢固地保持产品。

公开(公告)号：US06564474B2

公开(公告)日：2003-05-20

申请号：US09948570

申请日：2001-09-10

Applicant: Shinji Nagashima

Inventor： Shinji Nagashima

IPC: F26B1300

CPC classification number: H01L21/67103

Abstract: The present invention relates to a method for subjecting a substrate on which a coating film is formed to heat processing, and the method comprises the steps of heating the substrate to a predetermined high temperature and decreasing the temperature of the substrate to a predetermined low temperature, wherein in the step of decreasing the temperature of the substrate to the low temperature, a first step of decreasing the temperature of the substrate from the predetermined high temperature to a predetermined intermediate temperature and a second step of decreasing the temperature of the substrate from the intermediate temperature to the predetermined low temperature are performed separately. In the present invention, the step of decreasing the temperature of the substrate, which is heated to the high temperature, to the predetermined low temperature is divided into two stages as described above, and hence compared with a case where the temperature of the substrate is rapidly decreased nonstop from the high temperature to the low temperature, the temperature decreasing speed of the substrate is reduced, whereby cracks, a warp, and the like caused by the rapid cooling of the substrate can be prevented.

Abstract translation: 本发明涉及对其上形成有涂膜的基板进行加热处理的方法，该方法包括以下步骤：将基板加热到预定的高温并将基板的温度降低到预定的低温， 其中在将衬底的温度降低到低温的步骤中，将衬底的温度从预定的高温降低到预定的中间温度的第一步骤和从中间体降低衬底的温度的第二步骤 分别进行到预定低温的温度。 在本发明中，如上所述将被加热到高温的基板的温度降低到规定的低温的步骤分为两个阶段，因此与基板的温度为 从高温到低温不间断地迅速降低，基板的降温速度降低，从而可以防止由于基板的快速冷却而引起的裂纹，翘曲等。

公开(公告)号：US06473998B1

公开(公告)日：2002-11-05

申请号：US09559484

申请日：2000-04-27

Applicant: Pierre Henry ,  Didier Thibault

Inventor： Pierre Henry ,  Didier Thibault

IPC: F26B1300

CPC classification number: F26B13/001 ,  F26B13/101 ,  F26B13/28 ,  F26B13/30

Abstract: A process and a device for pre-drying textile filaments after wet treatment. A process and a device for predrying textile filaments after wet-treatment consist essentially in applying simultaneously to a layer of wet filaments (3) passing by on a conveyor (4) with a permeable conveying surface, on the one hand, a mechanical squeeze-drying action and, on the other hand, a pressure difference by circulation of air through said layer (3).

Abstract translation: 一种用于在湿处理之后预干燥纺织细丝的方法和装置。一种用于在湿处理之后预干燥纺织细丝的方法和设备基本上同时施用于通过传送带（4）的一层湿细丝（3） 一方面具有可渗透的输送表面，一方面是机械挤压干燥作用，另一方面，通过使空气通过所述层（3）的循环而产生压力差。