公开(公告)号：US07162881B2

公开(公告)日：2007-01-16

申请号：US10819509

申请日：2004-04-07

申请人： Michael Sogard

发明人： Michael Sogard

IPC分类号： F25B13/06

CPC分类号： G03F1/62 ,  G03F7/707 ,  G03F7/70875 ,  G03F7/70916 ,  H01L21/67109 ,  H01L21/6838

摘要： Methods and apparatus for enabling a clean, fragile object to be transported while protecting both front and back surfaces of the object are disclosed. According to one aspect of the present invention, a thermophoretic wand that is arranged to carry an object having a first temperature includes a first element, a contact surface, and an air supply. The first element has a first opening defined therein, and is maintained at a second temperature that is lower than the first temperature such that when the first element is in proximity to the object, a thermophoretic forces may be such that particles present between the object and the first element are driven away from the object. The air supply applies a vacuum of a first level through the first opening to suction the object against the contact surface.

摘要翻译： 公开了一种能够在保护物体的前表面和后表面的同时传送干净且脆弱的物体的方法和装置。 根据本发明的一个方面，一种布置成承载具有第一温度的物体的热泳棒包括第一元件，接触表面和空气供应。 第一元件具有限定在其中的第一开口，并且保持在低于第一温度的第二温度，使得当第一元件接近物体时，热泳能力可以使得存在于物体和 第一个元素被驱离远离对象。 空气供应通过第一开口施加第一级的真空以将物体吸附在接触表面上。