摘要:
The invention relates to a method for forming of perforations in a substrate, said perforations being formed by means of an intermittently operating plasmatron, the plasmatron forming an electrical discharge arc between a cathode and the substrate, and material being removed at the position where the arc strikes the substrate material, in the present case forming perforations. The invention also relates to a device for carrying out the method, in which an intermittently operating plasmatron and the substrate are moved relative to each other in order to form a pattern of perforations in the substrate.
摘要:
A method of and a structure for controlling the temperature of an electrode (4). The electrode is heated prior to etching the first wafer and both a (temporally) stationary and a (spatially) homogeneous temperature of the silicon electrode are maintained. Resistive heater elements (1) are either embedded within the housing of the electrode (3) or formed as part of the electrode. The resistive heater elements form a heater of a multi-zone type in order to minimize the temperature non-uniformity. The resistive heater elements are divided into a plurality of zones, wherein the power to each zone can be adjusted individually, allowing the desirable temperature uniformity of the electrode to be achieved. Preheating the electrode to the appropriate operating temperature eliminates both the nullfirst wafer effectnull and non-uniform etching of a semiconductor wafer.
摘要:
The invention relates to a blowing device (4) for a laser system (1) used for separating or welding workpieces (17). The blowing device (4) has at least one nozzle assembly (5), which generates a gas seam (7) that is oriented at an angle to the laser beam (3). The blowing device also has an air supply (8) which, on one side of the nozzle, leads into the proximity of the nozzle opening (6) and which is provided for an air supply stream (10) that is fed to the gas stream (7) in an essentially parallel manner or at an apex angle. A second air supply (9) is arranged on the other side of the nozzle. Said second air supply leads into the proximity of the nozzle opening (6) and is provided for a second air supply stream (11) that is fed to the gas steam (7) in an essentially parallel manner or at an apex angle. A protecting glass (13), which is oriented toward the gas stream (7) in an essentially parallel manner, can be alternatively or additionally placed in the proximity of the nozzle opening (6). Said protecting glass is provided in the form of a pane and directly abuts against the nozzle opening (6) in a sealed manner. In the preferred embodiment, the outer cross-section of the nozzle (5) is provided in the shape of a drop or a vane, whereby at least the outer surfaces thereof extending toward the nozzle opening (6) form air conducting surfaces (12).
摘要:
A thermal cutting machine and a cutting method using the same are described, which employ a simple, long-life torch hood for effectively shutting off spatter, the torch hood enabling easy supervision of the cut condition of a workpiece and easy replacement of the consumable parts of the torch. In the thermal cutting machine for cutting a metal by a plasma arc or laser beam generated from the torch, a hood liftable by an actuator is disposed so as to surround the torch and a control unit is provided for giving an instruction to the actuator to lower the hood to a torch-shielding position.
摘要:
The invention concerns an atmospheric plasma method for treating an object to be treated made of an electricity conducting material, comprising generating plasma jets with plasma generators on a surface to be treated of the treated object, and the relative displacement of the treated object relative to the plasma generators. At least one of the plasma jets is a cathodic jet and at least one of the plasma jets is an anodic jet, the anodic jet being applied in a treating zone on the surface to be treated proximate to the cathodic jet.
摘要:
Reactive atom plasma processing can be used to shape, polish, planarize and clean the surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch, such as a conventional ICP torch. The workpiece and plasma torch are moved with respect to each other, whether by translating and/or rotating the workpiece, the plasma, or both. The plasma discharge from the torch can be used to shape, planarize, polish, and/or clean the surface of the workpiece, as well as to thin the workpiece. The processing may cause minimal or no damage to the workpiece underneath the surface, and may involve removing material from the surface of the workpiece.
摘要:
A welding apparatus spot welds two or more overlapping sheets having a coating, such as zinc coated steel or aluminum alloy with an oxide coating. A hole is formed in the upper sheet at the desired point of spot welding. A clamping cup of a plasma arc passes surrounds the hole and contacts the upper surface of the upper sheet. The torch heats the sheet, allowing entrapped vapors in the coating on the lower sheet to vent freely. Filler wire is added to fill the hole and to secure the overlapping sheets together. If the overlapping sheets are zinc coated steel, preferably the filler wire is copper based.
摘要:
A plasma arc torch is provided that comprises torch head connections that are made between consumable components and a torch head independent of rotational alignment of the consumable components. Accordingly, connections for the flow of a cooling fluid, plasma gas, and/or a secondary gas are made independent of rotational alignment. Additionally, electrical connections are also provided that are independent of rotational alignment of the various plasma arc torch components.
摘要:
A torch for powder plasma buildup welding capable of readily attaining welding in conformity to any size of a pipe material to be subjected to welding, any configuration thereof and the like. A torch head is replaceably connected to a torch body. The torch body is provided with a gap formation spacer member which is abutted against an inner peripheral surface of the pipe material to keep a distance between an opening of a convergent nozzle of the torch head and the inner peripheral surface of the pipe material substantially constant during buildup welding. Also, the torch body is provided with a deflection restraint spacer member which is abutted against the inner peripheral surface of the pipe material to prevent deflection of the torch body in the pipe material during buildup welding.