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1.发明申请Method for forming of perforations in a substrate and device for carrying out said method 审中-公开在基板上形成穿孔的方法和用于执行所述方法的装置公开(公告)号：US20040020903A1
公开(公告)日：2004-02-05
申请号：US10258837
申请日：2003-06-16
IPC分类号： B23K009/02
CPC分类号： B23K10/003
摘要： The invention relates to a method for forming of perforations in a substrate, said perforations being formed by means of an intermittently operating plasmatron, the plasmatron forming an electrical discharge arc between a cathode and the substrate, and material being removed at the position where the arc strikes the substrate material, in the present case forming perforations. The invention also relates to a device for carrying out the method, in which an intermittently operating plasmatron and the substrate are moved relative to each other in order to form a pattern of perforations in the substrate.
摘要翻译： 本发明涉及一种在衬底中形成穿孔的方法，所述穿孔通过间歇操作的等离子体形成，所述等离子体在阴极和衬底之间形成放电弧，并且在电弧 撞击基板材料，在目前的情况下形成穿孔。 本发明还涉及一种用于实施该方法的装置，其中间歇操作的等离子体和基板相对于彼此移动，以便在基板中形成穿孔图案。
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公开(公告)号：US20040011770A1
公开(公告)日：2004-01-22
申请号：US10399981
申请日：2003-04-24
IPC分类号： B23K009/02
CPC分类号： H01L21/67248 , H01J37/32724 , H01L21/67069 , H01L21/67109
摘要： A method of and a structure for controlling the temperature of an electrode (4). The electrode is heated prior to etching the first wafer and both a (temporally) stationary and a (spatially) homogeneous temperature of the silicon electrode are maintained. Resistive heater elements (1) are either embedded within the housing of the electrode (3) or formed as part of the electrode. The resistive heater elements form a heater of a multi-zone type in order to minimize the temperature non-uniformity. The resistive heater elements are divided into a plurality of zones, wherein the power to each zone can be adjusted individually, allowing the desirable temperature uniformity of the electrode to be achieved. Preheating the electrode to the appropriate operating temperature eliminates both the nullfirst wafer effectnull and non-uniform etching of a semiconductor wafer.
摘要翻译： 一种用于控制电极（4）的温度的方法和结构。 在蚀刻第一晶片之前对电极进行加热，并保持硅电极的（时间上）固定和（空间上）均匀的温度。 电阻式加热器元件（1）嵌入电极（3）的外壳内或形成电极的一部分。 电阻加热器元件形成多区类型的加热器，以使温度不均匀化最小化。 电阻加热器元件被分成多个区域，其中可以单独地调节每个区域的功率，从而实现电极所需的温度均匀性。 将电极预热到适当的工作温度，消除半导体晶片的“第一晶片效应”和非均匀蚀刻。
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公开(公告)号：US20020195431A1
公开(公告)日：2002-12-26
申请号：US10169037
申请日：2002-06-20
发明人： Peter Rippl , Rudolf Huber
IPC分类号： B23K009/00 , B23K009/02
CPC分类号： B23K26/16 , B23K26/14 , B23K26/1438 , B23K26/1488
摘要： The invention relates to a blowing device (4) for a laser system (1) used for separating or welding workpieces (17). The blowing device (4) has at least one nozzle assembly (5), which generates a gas seam (7) that is oriented at an angle to the laser beam (3). The blowing device also has an air supply (8) which, on one side of the nozzle, leads into the proximity of the nozzle opening (6) and which is provided for an air supply stream (10) that is fed to the gas stream (7) in an essentially parallel manner or at an apex angle. A second air supply (9) is arranged on the other side of the nozzle. Said second air supply leads into the proximity of the nozzle opening (6) and is provided for a second air supply stream (11) that is fed to the gas steam (7) in an essentially parallel manner or at an apex angle. A protecting glass (13), which is oriented toward the gas stream (7) in an essentially parallel manner, can be alternatively or additionally placed in the proximity of the nozzle opening (6). Said protecting glass is provided in the form of a pane and directly abuts against the nozzle opening (6) in a sealed manner. In the preferred embodiment, the outer cross-section of the nozzle (5) is provided in the shape of a drop or a vane, whereby at least the outer surfaces thereof extending toward the nozzle opening (6) form air conducting surfaces (12).
摘要翻译： 本发明涉及一种用于分离或焊接工件（17）的激光系统（1）的吹风装置（4）。 吹风装置（4）具有至少一个喷嘴组件（5），其产生与激光束（3）成一角度定向的气体接缝（7）。 吹风装置还具有一个空气供应装置（8），其在喷嘴的一侧上引导到喷嘴开口（6）附近，并被设置用于供给气体流（10） （7）以基本平行的方式或以顶角形成。 在喷嘴的另一侧设置有第二供气装置（9）。 所述第二空气供应通道进入喷嘴开口（6）附近，并且被设置用于以基本上平行的方式或以顶角供给到气体蒸汽（7）的第二供气流（11）。 以基本上平行的方式朝向气流（7）取向的保护玻璃（13）可以可选地或另外地放置在喷嘴开口（6）附近。 所述保护玻璃以窗格的形式提供，并以密封方式直接抵靠喷嘴开口（6）。 在优选实施例中，喷嘴（5）的外部横截面设置为液滴或叶片的形状，至少其朝向喷嘴开口（6）延伸的外表面形成空气传导表面（12） 。
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公开(公告)号：US20040104203A1
公开(公告)日：2004-06-03
申请号：US10639757
申请日：2003-08-13
IPC分类号： B23K009/02
CPC分类号： B23K5/22 , B23K10/00 , B23K26/12 , B23K26/128 , B23K26/38 , B23K26/702 , B23K37/006 , B23K37/0461 , B23K37/06
摘要： A thermal cutting machine and a cutting method using the same are described, which employ a simple, long-life torch hood for effectively shutting off spatter, the torch hood enabling easy supervision of the cut condition of a workpiece and easy replacement of the consumable parts of the torch. In the thermal cutting machine for cutting a metal by a plasma arc or laser beam generated from the torch, a hood liftable by an actuator is disposed so as to surround the torch and a control unit is provided for giving an instruction to the actuator to lower the hood to a torch-shielding position.
摘要翻译： 描述了一种热切割机和使用该切割机的切割方法，其采用简单的长寿命的割炬罩来有效地关闭飞溅物，割炬罩能够容易地监督工件的切割状态并容易地更换消耗部件 的火炬。 在用于通过等离子体电弧切割金属的热切割机或由割炬产生的激光束的金属切割机中，由致动器提升的罩可设置成围绕割炬，并且设置控制单元以向致动器提供指令以降低 罩到火炬屏蔽位置。
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5.发明申请公开(公告)号：US20040026385A1
公开(公告)日：2004-02-12
申请号：US10399414
申请日：2003-05-08
发明人： Pavel Koulik , Anatolii Saitchenko , Nail Musin
IPC分类号： B23K009/02
CPC分类号： C23C16/402 , C23C16/513 , H05H1/44
摘要： The invention concerns an atmospheric plasma method for treating an object to be treated made of an electricity conducting material, comprising generating plasma jets with plasma generators on a surface to be treated of the treated object, and the relative displacement of the treated object relative to the plasma generators. At least one of the plasma jets is a cathodic jet and at least one of the plasma jets is an anodic jet, the anodic jet being applied in a treating zone on the surface to be treated proximate to the cathodic jet.
摘要翻译： 本发明涉及一种用于处理由导电材料制成的待处理物体的大气等离子体方法，包括在被处理物体待处理的表面上产生等离子体发生器的等离子体射流，以及被处理物体相对于 等离子发生器 等离子体射流中的至少一个是阴极射流，并且等离子体射流中的至少一个是阳极射流，阳极射流被施加在靠近阴极射流的被处理表面上的处理区域中。
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公开(公告)号：US20040011771A1
公开(公告)日：2004-01-22
申请号：US10245781
申请日：2002-09-16
IPC分类号： B23K009/02
CPC分类号： H05H1/34 , H05H2001/3468 , H05H2001/3489
摘要： A tip for a plasma arc torch includes a ridge for improved electrical contact with a starting member.
摘要翻译： 等离子弧焊炬的尖端包括用于改善与起始构件的电接触的脊。
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7.发明申请Apparatus and method for atmospheric pressure reactive atom plasma processing for surface modification 有权用于表面改性的大气压反应性原子等离子体处理装置和方法公开(公告)号：US20020100751A1
公开(公告)日：2002-08-01
申请号：US10002483
申请日：2001-11-01
发明人： Jeffrey W. Carr
IPC分类号： B23K009/00 , B23K009/02 , H05B001/00 , H05B003/00 , H05B011/00
CPC分类号： H01L21/67092 , B23K1/206 , C03C15/00 , C04B41/53 , C04B41/91 , C23C16/047 , H05H1/30 , H05H2245/123
摘要： Reactive atom plasma processing can be used to shape, polish, planarize and clean the surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch, such as a conventional ICP torch. The workpiece and plasma torch are moved with respect to each other, whether by translating and/or rotating the workpiece, the plasma, or both. The plasma discharge from the torch can be used to shape, planarize, polish, and/or clean the surface of the workpiece, as well as to thin the workpiece. The processing may cause minimal or no damage to the workpiece underneath the surface, and may involve removing material from the surface of the workpiece.
摘要翻译： 反应性原子等离子体处理可以用最小的地下损伤来塑造，抛光，平坦化和清洁困难材料的表面。 该装置和方法使用诸如常规ICP喷枪的等离子体焰炬。 无论是通过平移和/或旋转工件，等离子体还是两者，工件和等离子体焰炬相对于彼此移动。 来自焊炬的等离子体放电可用于成形，平坦化，抛光和/或清洁工件的表面，以及使工件变薄。 该处理可能对表面下方的工件造成最小的损伤或没有损坏，并且可能涉及从工件的表面移除材料。
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公开(公告)号：US20040238503A1
公开(公告)日：2004-12-02
申请号：US10801484
申请日：2004-03-16
IPC分类号： B23K010/00 , B23K009/02
摘要： A welding apparatus spot welds two or more overlapping sheets having a coating, such as zinc coated steel or aluminum alloy with an oxide coating. A hole is formed in the upper sheet at the desired point of spot welding. A clamping cup of a plasma arc passes surrounds the hole and contacts the upper surface of the upper sheet. The torch heats the sheet, allowing entrapped vapors in the coating on the lower sheet to vent freely. Filler wire is added to fill the hole and to secure the overlapping sheets together. If the overlapping sheets are zinc coated steel, preferably the filler wire is copper based.
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公开(公告)号：US20040079735A1
公开(公告)日：2004-04-29
申请号：US10409631
申请日：2003-04-07
IPC分类号： B23K009/02
CPC分类号： B23K9/291 , B23K10/00 , H05H1/28 , H05H1/34 , H05H2001/3431 , H05H2001/3436 , H05H2001/3442 , H05H2001/3468 , H05H2001/3478 , H05H2001/3489
摘要： A plasma arc torch is provided that comprises torch head connections that are made between consumable components and a torch head independent of rotational alignment of the consumable components. Accordingly, connections for the flow of a cooling fluid, plasma gas, and/or a secondary gas are made independent of rotational alignment. Additionally, electrical connections are also provided that are independent of rotational alignment of the various plasma arc torch components.
摘要翻译： 提供了一种等离子弧焊炬，其包括在消耗部件和割炬头之间形成的割炬头连接，独立于可消耗部件的旋转对准。 因此，冷却流体，等离子体气体和/或次级气体的流动的连接是与旋转对准无关的。 此外，还提供独立于各种等离子弧焊炬组件的旋转对准的电连接。
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公开(公告)号：US20030213781A1
公开(公告)日：2003-11-20
申请号：US10434513
申请日：2003-08-01
发明人： Yoshimi Onitsuka , Minoru Imai
IPC分类号： B23K009/02
摘要： A torch for powder plasma buildup welding capable of readily attaining welding in conformity to any size of a pipe material to be subjected to welding, any configuration thereof and the like. A torch head is replaceably connected to a torch body. The torch body is provided with a gap formation spacer member which is abutted against an inner peripheral surface of the pipe material to keep a distance between an opening of a convergent nozzle of the torch head and the inner peripheral surface of the pipe material substantially constant during buildup welding. Also, the torch body is provided with a deflection restraint spacer member which is abutted against the inner peripheral surface of the pipe material to prevent deflection of the torch body in the pipe material during buildup welding.
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