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    System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source
    1.
    发明授权
    System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source 有权
    同时加油和减轻等离子体照明光源碎片的系统和方法

    公开(公告)号：US09155180B1

    公开(公告)日：2015-10-06

    申请号：US13647826

    申请日：2012-10-09

    Applicant: KLA-Tencor Corporation

    Inventor： Karl R. Umstadter

    IPC: H05H1/00 ,  H01J27/08 ,  G03F7/20 ,  H01J17/30

    CPC classification number: H05H1/00 ,  G03F7/70916 ,  H01J17/30 ,  H01J27/08 ,  H05G2/003

    Abstract: The disclosure is directed to a system and method of fueling and mitigating debris for an illumination source. An illumination system may include a plasma-based illumination source. The illumination system may provide illumination along an illumination path emanating from an illumination origin of the illumination source. A gas jet nozzle may be disposed at a selected distance from the illumination origin or proximate to the illumination origin. The gas jet nozzle may be configured to provide fuel gas to fuel the plasma-based illumination source. The gas jet nozzle may be further configured to provide fuel gas in a selected direction substantially opposite to a direction of illumination emanating from the illumination origin to remove at least a portion of debris from the illumination path.

    Abstract translation: 本公开涉及一种用于加注和减轻照明源的碎屑的系统和方法。 照明系统可以包括基于等离子体的照明源。 照明系统可以沿着从照明源的照明原点发出的照明路径提供照明。 气体喷嘴可以设置在距照明原点或接近照明原点的选定距离处。 气体喷嘴可以被配置为提供燃料气体来燃料基于等离子体的照明源。 气体喷嘴可以进一步构造成在与从照明原点发出的照明方向基本相反的选定方向上提供燃料气体，以从照明路径去除至少一部分碎片。

    High coulombic switch gas discharge device
    2.
    发明授权
    High coulombic switch gas discharge device 失效
    高库仑开关气体放电装置

    公开(公告)号：US6049174A

    公开(公告)日：2000-04-11

    申请号：US875746

    申请日：1997-08-04

    Applicant: Colin Archibold Pirrie ,  Clive Anthony Roberts ,  Kenneth Cook ,  Cliff Robert Weatherup

    Inventor： Colin Archibold Pirrie ,  Clive Anthony Roberts ,  Kenneth Cook ,  Cliff Robert Weatherup

    IPC: H01J17/54 ,  H01J17/30 ,  H01J17/44 ,  H05B37/00 ,  H01J1/46

    CPC classification number: H01J17/30 ,  H01J17/44

    Abstract: A device suitable for switching large currents includes, within a gas filled envelope, an anode, electrodes and a thermionic cathode. Initially the device holds off a voltage until a triggering pulse is applied to an electrode. This cause an electron current to be established between the thermionic cathode and the anode. When the current reaches a sufficiently large value further conduction through the device occurs via current drawn from the surface of the electrode in a cold cathode mode, bypassing the cathode.

    Abstract translation: PCT No.PCT / GB96 / 00278 Sec。 371日期：1997年8月4日 102（e）日期1997年8月4日PCT提交1996年2月8日PCT公布。 第WO96 / 24945号公报 日期1997年8月15日适用于切换大电流的装置包括在充满气体的封套内的阳极，电极和热离子阴极。 最初，器件保持电压，直到触发脉冲施加到电极。 这导致在热离子阴极和阳极之间建立电子电流。 当电流达到足够大的值时，通过在冷阴极模式下从电极表面引出的电流进一步传导通过器件，绕过阴极。

    Gas Discharge surge tube with specific trigger wires arrangement
    3.
    发明授权
    Gas Discharge surge tube with specific trigger wires arrangement 失效
    气体放电浪涌管，具有特定的触发线布置

    公开(公告)号：US6025672A

    公开(公告)日：2000-02-15

    申请号：US44805

    申请日：1998-03-20

    Applicant: Kazuhiko Machida

    Inventor： Kazuhiko Machida

    IPC: H05B41/04 ,  H01J17/30 ,  H01J17/46 ,  H01T1/20 ,  H01T2/02 ,  H01T4/12 ,  H01J17/26

    CPC classification number: H01J17/46 ,  H01J17/30 ,  H01T1/20 ,  H01T4/12

    Abstract: It is an object of the invention to provide a discharge tube in which the electrical insulating property between the discharge trigger wires is not deteriorated by the sputtering substance generated when discharge is conducted between the upper and the lower discharge electrode. There are provided sub-discharge trigger wires 50 at the center of the inner circumferential wall of the airtight cylinder 10 under the condition that the sub-discharge trigger wires 50 are electrically insulated from the upper and the lower discharge electrode. At the same time, there are provided discharge trigger wires 30a connected with the upper discharge electrode and discharge trigger wires 30b connected with the lower discharge electrode in the upper and the lower portion of the inner circumferential wall of the airtight cylinder 10 at which there is no possibility of adhesion of the sputtering substance 40 generated in the process of discharging conducted by the upper and the lower discharge electrode. A distance between the discharge trigger wires 30a, 30b is electrically reduced via the sub-discharge trigger wires 50. An initial discharge is stably generated at an early stage between the fore end portions of the discharge trigger wires 30a, 30b and the end portions of the sub-discharge trigger wires 50 located close to the discharge trigger wires 30a, 30b.

    Abstract translation: 本发明的目的是提供一种放电管，其中放电触发线之间的电绝缘性不会因在上下放电电极之间放电时产生的溅射物质而劣化。 在副放电触发线50与上部和下部放电电极电绝缘的条件下，在气密筒10的内周壁的中心设置有副放电触发线50。 同时，设置有与上部放电电极连接的放电触发线30a和与气密筒10的内周壁的上部和下部中的下部放电电极连接的放电触发线30b， 在由上下放电电极进行的放电处理中产生的溅射物质40没有粘附的可能性。 放电触发线30a，30b之间的距离通过副放电触发线50电性地减小。在放电触发线30a，30b的前端部分和前端部分之间的初始放电稳定地产生， 位于靠近放电触发线30a，30b的副放电触发线50。

    Switching apparatus
    4.
    发明授权
    Switching apparatus 失效
    开关装置

    公开(公告)号：US5631524A

    公开(公告)日：1997-05-20

    申请号：US279163

    申请日：1994-07-22

    Applicant: Kazuo Matsuzaki ,  Arika Amano

    Inventor： Kazuo Matsuzaki ,  Arika Amano

    IPC: H01J21/10 ,  H01J3/02 ,  H01J17/06 ,  H01J17/14 ,  H01J17/30 ,  H01J17/40 ,  H01J21/02 ,  H01J21/06 ,  H01J21/18 ,  H03K17/54 ,  H01J11/04

    CPC classification number: H01J3/022 ,  H01J17/066 ,  H01J17/14 ,  H01J17/30 ,  H01J17/40 ,  H03K17/545

    Abstract: A switching apparatus obtains a large switching current by multiplying the number of electrons emitted by field emission from a cold cathode. The switching apparatus is driven by an optical wave and includes a recess portion of an insulation layer formed on a silicon substrate, a cold cathode formed on the insulation layer comprising many comb-tooth like tips extending from one side above the recess portion, a gate electrode disposed on the recess portion on the side of the cold cathode, an anode formed on the insulation layer and extending from another side opposed facing to the one side above the recess portion, an optically transparent sealing member comprising a recess portion on its under surface for enclosing a dilute nitrogen gas in a vacuum space, and a semiconductor laser, supported on the sealing member by a support member, for irradiating a laser beam through the sealing member into the space.

    Abstract translation: 开关装置通过将来自冷阴极的场发射发射的电子数乘以来获得大的开关电流。 开关装置由光波驱动，并且包括形成在硅衬底上的绝缘层的凹部，形成在绝缘层上的冷阴极，包括从凹部的上方一侧延伸的梳齿状尖端，栅极 设置在所述冷阴极侧的所述凹部的电极，形成在所述绝缘层上并从所述凹部的上方相对的另一侧延伸的阳极，在所述凹部的下表面上具有凹部的透光性密封构件 用于将稀氮气包围在真空空间中，以及半导体激光器，其通过支撑构件支撑在所述密封构件上，用于将激光束通过所述密封构件照射到所述空间中。

    Discharge tube
    5.
    发明授权
    Discharge tube 失效
    放电管

    公开(公告)号：US5473220A

    公开(公告)日：1995-12-05

    申请号：US417271

    申请日：1995-04-05

    Applicant: Takashi Sato ,  Takahisa Suzuki ,  Tetsuya Mitani ,  Hiromitsu Tsuchiya

    Inventor： Takashi Sato ,  Takahisa Suzuki ,  Tetsuya Mitani ,  Hiromitsu Tsuchiya

    IPC: H01J61/35 ,  H01J17/30 ,  H01T1/20

    CPC classification number: H01J17/30

    Abstract: A discharge tube according to the present invention is constructed such that it comprises a cylindrical container made of an insulation tube, a pair of discharge electrodes provided at opposite ends of the cylindrical container, a plurality of insulation coated lines containing a gas-ionization accelerator therein, which insulation coated lines being provided on the inner surface of the cylindrical container covering the regions surrounding a cathode and a discharge space therein in a substantially parallel relation with a center axis of the cylindrical container, wherein the gas-ionization accelerator is made of a silicate powder selected from the group of alkaline metal, alkaline earth metal and so on, or of electrically conductive finely divided particles selected from the group of carbon, metal, metal oxide and so on. The discharge tube according to the present invention shows stabilized discharge inception characteristics even when the frequency of repetitive discharge is low, and in addition, it does not generate an inner creeping discharge even if it is continuously used for a long time, thereby providing a stabilized discharge operation.

    Abstract translation: 根据本发明的放电管被构造成使得其包括由绝缘管制成的圆柱形容器，设置在圆筒形容器的相对端的一对放电电极，在其中包含气体电离加速器的多个绝缘涂覆线 在圆筒形容器的内表面上设置绝缘涂层线，该圆筒形容器的内表面覆盖围绕阴极的区域和与圆柱形容器的中心轴线基本平行的放电空间，其中气体电离加速器由 选自碱金属，碱土金属等的硅酸盐粉末，或者选自碳，金属，金属氧化物等的导电性微细颗粒。 根据本发明的放电管即使在重复放电的频率低的情况下也表现出稳定的放电起始特性，并且即使长时间连续使用也不会产生内部沿面放电，从而提供稳定的 放电操作。

    Capacitively coupled trigger for pseudogap cold cathode thyratrons
    6.
    发明授权
    Capacitively coupled trigger for pseudogap cold cathode thyratrons 失效
    用于假型冷阴极闸流闸的电容耦合触发器

    公开(公告)号：US5418423A

    公开(公告)日：1995-05-23

    申请号：US963415

    申请日：1992-10-19

    Applicant: Gordon A. Murray

    Inventor： Gordon A. Murray

    IPC: H01J17/30 ,  H01J17/46 ,  H01T2/02 ,  H01J17/00

    CPC classification number: H01T2/02 ,  H01J17/30 ,  H01J17/46

    Abstract: An improved gas discharge trigger for a pseudogap cold cathode thyratron. Electrical trigger pulses are capacitively coupled through the vacuum envelope wall (16) causing a gas discharge adjacent to the rear of the hollow cathode (26). Coupling apertures (12) between the trigger discharge region and the hollow cathode allow ionization to propagate into the rear of the hollow cathode and trigger the pseudogap from a non conducting to conducting state.

    Abstract translation: 一种用于假型冷阴极闸流管的改进的气体放电触发器。 电触发脉冲通过真空封套壁（16）电容耦合，导致邻近空心阴极（26）后部的气体放电。 触发放电区域和空心阴极之间的耦合孔（12）允许电离传播到空心阴极的后部，并将伪间隙从非导通状态引导到导通状态。

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