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公开(公告)号：US20240361533A1
公开(公告)日：2024-10-31
申请号：US18769241
申请日：2024-07-10
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chih-Tsung SHIH , Chewn-Pu JOU , Stefan RUSU , Felix Ying-Kit TSUI , Lan-Chou CHO
Abstract: Disclosed are apparatus and methods for optical coupling. In one example, a method for forming an optical coupler, includes: forming an insulation layer on a semiconductor substrate; epitaxially growing a semiconductor material on the insulation layer to form a semiconductor layer; etching, according to a predetermined pattern, the semiconductor layer to form: an array of etched holes in the semiconductor layer to form a grating region, a first taper structure extending from a first side of the grating region, wherein a shape of the first taper structure in the semiconductor layer is a first triangle that is asymmetric about any line perpendicular to the first side of the grating region, and a second taper structure extending from a second side of the grating region, wherein a shape of the second taper structure in the semiconductor layer is a second triangle that is asymmetric about any line perpendicular to the second side of the grating region, wherein the first side and the second side are substantially perpendicular to each other; and depositing a dielectric material into the array of etched regions to form an array of scattering elements in the semiconductor layer, wherein the scattering elements are arranged to form a two-dimensional (2D) grating.
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公开(公告)号：US20240361530A1
公开(公告)日：2024-10-31
申请号：US18766541
申请日：2024-07-08
Inventor： Feng-Wei KUO , Chewn-Pu Jou , Cheng-Tse Tang , Hung-Yi Kuo
IPC: G02B6/30
CPC classification number: G02B6/305
Abstract: An optical coupler is provided. The optical coupler includes: a first optical structure, and a second optical structure disposed over the first optical structure. The first optical structure includes: a first substrate, a first cladding layer disposed on the first substrate, and a first waveguide disposed on the first cladding layer. The first waveguide includes a first coupling portion, and the first coupling portion including a first taper part. The second optical structure includes: a second substrate, a dielectric layer disposed on the second substrate; and a second waveguide disposed on the dielectric layer. The second waveguide includes a second coupling portion, and the second coupling portion including a second taper part. The second taper part is disposed on and optically coupled with the first taper part, and a taper direction of the first taper part is the same as a taper direction of the second taper part.
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公开(公告)号：US20240353625A1
公开(公告)日：2024-10-24
申请号：US18302224
申请日：2023-04-18
Inventor： Hau-Yan Lu , Wei-Kang Liu , Yingkit Felix Tsui
IPC: G02B6/30
CPC classification number: G02B6/305
Abstract: Some embodiments relate to an integrated chip (IC) including a handle substrate; a semiconductor layer comprising a grating coupler region and an edge coupler region; an insulative layer between the handle substrate and the semiconductor layer; a grating coupler in the grating coupler region comprising a plurality of trenches arranged in the semiconductor layer; and an edge coupler in the edge coupler region of the semiconductor layer including: a base structure having an end proximate to an edge of the insulative layer, and tapered sidewalls extending laterally from the end; and an upper structure extending over the base structure, the upper structure having an end proximate to the edge of the insulative layer, and tapered sidewalls extending laterally from the end between the tapered sidewalls of the base structure; where the handle substrate continuously extends from directly beneath the plurality of trenches to directly beneath the upper structure.
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公开(公告)号：US20240248258A1
公开(公告)日：2024-07-25
申请号：US18157626
申请日：2023-01-20
Applicant: Cisco Technology, Inc.
Inventor： Norbert SCHLEPPLE , Donald J. ADAMS , Vipulkumar K. PATEL
IPC: G02B6/30
CPC classification number: G02B6/305
Abstract: An optical coupler and a method performed by the optical coupler are described. The optical coupler includes an interlayer dielectric, a waveguide disposed within the interlayer dielectric, and an epoxy disposed on the interlayer dielectric and in the first cavity such that the epoxy defines an upper surface and a bottom surface. The interlayer dielectric includes a first surface and a second surface coupled to the first surface. The first surface and the second surface define a first cavity in the interlayer dielectric. The waveguide emits an optical signal through the first surface. The bottom surface is positioned between the interlayer dielectric and the upper surface. The epoxy directs the optical signal from the first surface to the second surface. The second surface and the epoxy direct a first portion of the optical signal through the upper surface.
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公开(公告)号：US20240134123A1
公开(公告)日：2024-04-25
申请号：US18334291
申请日：2023-06-13
Applicant: ProMOS Technologies Inc.
Inventor： Ping Ming LIU , Hsiao Che WU
IPC: G02B6/30
CPC classification number: G02B6/305
Abstract: A photonic integrated circuit structure includes a substrate, a waveguide structure and a spot size converter. The waveguide structure is disposed over a surface of the substrate and has a receiving end. The spot size converter includes a concave mirror and a curved mirror. The concave mirror and the curved mirror are opposite to each other and have a common focus. The concave mirror is arranged to reflect a parallel beam from a transmitting end such that a first reflected beam is able to converge at the common focus, and the curved mirror is arranged to reflect the first reflected beam such that a second reflected beam is directed parallel to the receiving end of the waveguide structure.
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Patent Agency Ranking
6.发明授权公开(公告)号：US11934007B2
公开(公告)日：2024-03-19
申请号：US17624922
申请日：2020-07-03
Applicant: ALMAE TECHNOLOGIES
Inventor： Hélène Debregeas , François Lelarge , David Carrara
CPC classification number: G02B6/12004 , G02B6/12002 , G02B6/1228 , G02B6/136 , G02B6/305 , G02B2006/12061 , G02B2006/12123
Abstract: An assembly of an active semiconductor component and of a silicon-based passive optical component includes a carrier; and the active semiconductor component and the passive optical component both arranged on the carrier. The active semiconductor component includes a first set of semiconductor layers comprising at least one first waveguide configured to guide, in a first section of the assembly, at least one first optical mode; a second set of semiconductor layers, the set being superposed and making contact with the first set of layers, and including at least one second waveguide configured to guide at least one second optical mode. At least some of the layers of the first set of layers and of the second set of layers are doped to form, in a first region of the component, a PIN diode. The at least one first waveguide and the at least one second waveguide are configured to allow evanescent coupling therebetween, in a second section of the assembly. The first set of layers is etched to form, in a second region of the active semiconductor component, a first surface flush with the second waveguide. The passive component includes a substrate; a set of silicon-compound layers comprising at least one waveguide configured to guide at least one optical mode. The at least one waveguide lies flush with a first surface of the set of layers, which surface is opposite a second surface of the set of layers making contact with a surface of the substrate. The first surface of the passive optical component makes contact with the first surface of the active semiconductor component in order to allow evanescent coupling between the at least one waveguide of the passive optical component and the at least one second waveguide of the active semiconductor component.
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公开(公告)号：US11860421B2
公开(公告)日：2024-01-02
申请号：US17097270
申请日：2020-11-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei Song , Chan-Hong Chern , Chewn-Pu Jou , Stefan Rusu , Min-Hsiang Hsu
Abstract: An optical system with different optical coupling device configurations and a method of fabricating the same are disclosed. An optical system includes a substrate, a waveguide disposed on the substrate, an optical fiber optically coupled to the waveguide, and an optical coupling device disposed between the optical fiber and the waveguide. The optical coupling device configured to optically couple the optical fiber to the waveguide. The optical coupling device includes a dielectric layer disposed on the substrate, a semiconductor tapered structure disposed in a first horizontal plane within the dielectric layer, and a multi-tip dielectric structure disposed in a second horizontal plane within the dielectric layer. The first and second horizontal planes are different from each other.
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公开(公告)号：US20230375785A1
公开(公告)日：2023-11-23
申请号：US18362121
申请日：2023-07-31
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Shih-Wei Lin
CPC classification number: G02B6/305 , G02B6/1228
Abstract: Structures and methods including a waveguide having a cladding layer surrounding a core layer disposed over a substrate, a cavity extending into the substrate adjacent the waveguide, a fiber disposed in the cavity, and an isolation space extending into the substrate and disposed under the waveguide. A plurality of holes may extend through the cladding layer adjacent the core layer.
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公开(公告)号：US11822123B2
公开(公告)日：2023-11-21
申请号：US17058001
申请日：2019-05-31
Inventor： Hindrik Bulthuis , Duncan P. Nicol
CPC classification number: G02B6/1228 , G02B6/12002 , G02B6/12004 , G02B6/262 , G02B6/12019 , G02B6/305
Abstract: Roughly described, an optical device includes a first waveguide having a first core sheathed by a first cladding, and a second waveguide having a second core. A terminal portion of second core is disposed under a terminal portion of the first core and sheathed by the first core. The refractive index of the second core is higher than that of the first core, and the index of the first core, at least in the terminal portion of the first waveguide, is higher than that of the first cladding. The second core is structured under the terminal portion of the first core so that light traveling in the second core and directed toward the end of the second core is guided along the second core and coupled into the first core, and vice-versa.
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公开(公告)号：US11803016B2
公开(公告)日：2023-10-31
申请号：US17701942
申请日：2022-03-23
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian
CPC classification number: G02B6/4203 , G02B6/1228 , G02B6/305
Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure includes a substrate, a waveguide core, and a metamaterial layer positioned in a vertical direction between the substrate and the waveguide core. The metamaterial layer includes a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps.
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