Additives for Producing Copper Electrodeposits Having Low Oxygen Content
    2.
    发明申请
    Additives for Producing Copper Electrodeposits Having Low Oxygen Content 有权
    用于生产低含氧量的铜电沉积物的添加剂

    公开(公告)号:US20130313119A1

    公开(公告)日:2013-11-28

    申请号:US13480887

    申请日:2012-05-25

    Applicant: Trevor Pearson

    Inventor: Trevor Pearson

    CPC classification number: C25D1/04 C25D3/38 C25D3/40 C25D21/04

    Abstract: A copper electroplating bath for producing copper electrodeposits is described. The copper electroplating bath comprises (a) a soluble copper salt, (b) an electrolyte comprising one or more acids, and (c) a grain refining additive comprising an alkyl, aryl or alkylaryl diamine. The copper electroplating bath can be used for producing electroformed copper deposits having low oxygen content.

    Abstract translation: 描述了用于生产铜电沉积物的铜电镀浴。 铜电镀浴包括(a)可溶性铜盐,(b)包含一种或多种酸的电解质,和(c)包含烷基,芳基或烷基芳基二胺的晶粒细化添加剂。 铜电镀浴可用于生产氧含量低的电铸铜矿床。

    SURFACE-ACTIVE CONDITIONAL INHIBITORS FOR THE ELECTROPLATING OF COPPER ON A SURFACE
    4.
    发明申请
    SURFACE-ACTIVE CONDITIONAL INHIBITORS FOR THE ELECTROPLATING OF COPPER ON A SURFACE 审中-公开
    表面活性物质在表面上电镀铜的条件抑制剂

    公开(公告)号:US20100243467A1

    公开(公告)日:2010-09-30

    申请号:US12294947

    申请日:2007-04-02

    Inventor: Daniel Michelet

    CPC classification number: C25D3/38 C25D3/40

    Abstract: Electrolytes for the electroplating of copper comprising, as inhibitor, a poly(alkylene-biguanide) salt. The inhibition developed by poly(alkylene-biguanide) salts is conditioned by the concentration of an accelerator on the surface of the copper. The surfactancy of poly(alkylene-biguanide) salts enables them to be instantly transferred from the electrolyte/air interface to the electrolyte/copper interface during contact between the cathode and the electrolyte. The electrolytes according to the invention are suitable for obtaining smooth and bright electroplated coatings and for depositing copper on surfaces having submicron-scale concavities useful in microelectronics.

    Abstract translation: 用于电镀铜的电解质,其包含作为抑制剂的聚(亚烷基 - 双胍)盐。 由聚(亚烷基 - 双胍)盐形成的抑制作用是通过铜表面上的促进剂的浓度来调节的。 聚(亚烷基 - 双胍)盐的表面活性使得它们在阴极和电解质之间的接触期间能够从电解质/空气界面立即转移到电解质/铜界面。 根据本发明的电解质适用于获得光滑和明亮的电镀涂层,并且用于在具有在微电子学中有用的亚微米级凹面的表面上沉积铜。

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