-
公开(公告)号:US20240075500A1
公开(公告)日:2024-03-07
申请号:US17929521
申请日:2022-09-02
Applicant: Exo Imaging, Inc.
Inventor: Haesung KWON , Brian BIRCUMSHAW , Sandeep AKKARAJU
CPC classification number: B06B1/0666 , A61B8/4488 , G01S15/8915
Abstract: Provided herein are micromachined ultrasonic transducers as well as imaging devices and assemblies comprising micromachined ultrasonic transducers (MUTs). The MUTs described herein have a plurality of membranes so as to improve acoustic power at higher frequencies.
-
公开(公告)号:US20200249079A1
公开(公告)日:2020-08-06
申请号:US16837800
申请日:2020-04-01
Applicant: eXo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
IPC: G01H11/08 , H01L41/113 , G01S15/02 , G01N29/07 , H01L41/18
Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.
-
3.
公开(公告)号:US20250001455A1
公开(公告)日:2025-01-02
申请号:US18679282
申请日:2024-05-30
Applicant: Exo Imaging, Inc.
Inventor: Brian BIRCUMSHAW , Sandeep AKKARAJU , Haesung KWON
Abstract: Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.
-
公开(公告)号:US20240307035A1
公开(公告)日:2024-09-19
申请号:US18668668
申请日:2024-05-20
Applicant: Exo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Yusuf HAQUE , Janusz BRYZEK
IPC: A61B8/00 , A61B8/08 , A61B8/14 , B06B1/02 , B06B1/06 , G01S7/52 , G01S7/521 , G01S15/89 , H10N30/20 , H10N30/88
CPC classification number: A61B8/4494 , A61B8/0883 , A61B8/145 , A61B8/4483 , A61B8/4488 , A61B8/461 , A61B8/488 , A61B8/5207 , A61B8/546 , B06B1/0215 , B06B1/0238 , B06B1/0629 , B06B1/0662 , B06B1/0692 , G01S7/52046 , G01S7/52079 , G01S7/521 , G01S15/8925 , H10N30/2047 , H10N30/2048 , H10N30/704 , H10N30/88 , A61B8/4427 , A61B8/4472 , B06B2201/76
Abstract: An imaging system includes: a transceiver cell for generating a pressure wave and converting an external pressure wave into an electrical signal; and a control unit for controlling an operation of the transceiver cell. The transceiver cell includes: a substrate; at least one membrane suspending from the substrate; and a plurality of transducer elements mounted on the at least one membrane. Each of the plurality of transducer elements has a bottom electrode, a piezoelectric layer on bottom electrode, and at least one top electrode on the piezoelectric layer. Each of the plurality of transducer element generates a bending moment in response to applying an electrical potential across the bottom electrode and the at least one top electrode and develops an electrical charge in response to a bending moment due to the external pressure wave.
-
公开(公告)号:US20200225082A1
公开(公告)日:2020-07-16
申请号:US16833333
申请日:2020-03-27
Applicant: eXo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
Abstract: A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
-
公开(公告)号:US20240286173A1
公开(公告)日:2024-08-29
申请号:US18656525
申请日:2024-05-06
Applicant: Exo Imaging, Inc.
Inventor: Haesung KWON , Brian BIRCUMSHAW , Sandeep AKKARAJU
CPC classification number: B06B1/0622 , G01H11/08 , G01N29/2406 , B06B1/0292 , H10N30/2047
Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.
-
公开(公告)号:US20240082876A1
公开(公告)日:2024-03-14
申请号:US18514989
申请日:2023-11-20
Applicant: Exo Imaging, Inc.
Inventor: Haesung KWON , Brian BIRCUMSHAW , Sandeep AKKARAJU
IPC: B06B1/06
CPC classification number: B06B1/0603 , A61B8/4483
Abstract: A micromachined ultrasonic transducer (MUT) which comprises a first piezoelectric layer and a second piezoelectric layer. The first piezoelectric layer is disposed between a first electrode and a second electrode. The second piezoelectric layer is disposed between the second electrode and a third electrode. At least the first electrode has first and second ends along a first axis, one or more of which is defined by a radius of curvature R. A second axis normal to the first passes through a midpoint of the first axis. A half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode. A total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape. R/L is greater than 1.
-
公开(公告)号:US20220304659A1
公开(公告)日:2022-09-29
申请号:US17215776
申请日:2021-03-29
Applicant: eXo Imaging, Inc.
Inventor: Brian BIRCUMSHAW , Sandeep AKKARAJU , Drake GUENTHER , Haesung KWON , Anthony BROCK
Abstract: Described are micromachined ultrasonic transducer (MUT) arrays with trenches, reducing cross-talk between MUTs to mitigate undesirable artifacts in ultrasound images, as well as methods of making the same.
-
公开(公告)号:US20210364348A1
公开(公告)日:2021-11-25
申请号:US17395171
申请日:2021-08-05
Applicant: Exo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
IPC: G01H11/08 , H01L41/18 , G01N29/07 , G01S15/02 , H01L41/113
Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.
-
公开(公告)号:US20240310209A1
公开(公告)日:2024-09-19
申请号:US18679296
申请日:2024-05-30
Applicant: Exo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
CPC classification number: G01H11/08 , G01N29/07 , G01S15/02 , H10N30/302 , H10N30/852 , B81B3/0021
Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.
-
-
-
-
-
-
-
-
-