公开(公告)号：US5558721A

公开(公告)日：1996-09-24

申请号：US337056

申请日：1994-11-10

申请人： Yukio Kohmura ,  Koichi Toyosaki

发明人： Yukio Kohmura ,  Koichi Toyosaki

IPC分类号： C23C16/458 ,  F01D15/06 ,  C23C16/00 ,  F01D5/12 ,  F01D7/00

CPC分类号： F01D15/067 ,  C23C16/4588

摘要： A vapor phase growth system comprises a gas-drive motor including a ring-shaped stator and a rotor housed in a rotor chamber formed in the stator, and designed to rotate the rotor by injecting a gas toward gas receiving grooves in the peripheral surface of the rotor through injection ports which open in the peripheral surface of the rotor chamber. A rotating shaft of a susceptor rotating mechanism extends along the axis of a susceptor in a reactor, and has one end fixed to the top wall of the susceptor. A tray rotating shaft, having one end fixed to each of trays arranged individually in recesses in the outer surface of the susceptor, extends penetrating the peripheral wall of the susceptor. As a rotating shaft of a drive mechanism rotates, a wafer supported by each tray revolves around the rotating shaft. A gear fixed to the other end of the tray rotating shaft is in mesh with a ring gear on the upper end face of a hollow rotating member fixed to the upper surface of the rotor and located coaxially with the rotating shaft of the drive mechanism. As the rotor rotates, each tray is rotated by the tray rotating shaft gear-connected to the hollow rotating member, so that the wafer rotates around the tray rotating shaft. Accordingly, the speeds of rotation and revolution of the wafer can change independently of each other.

摘要翻译： 气相生长系统包括气体驱动电动机，其包括环形定子和转子，该转子容纳在形成在定子中的转子室中，并被设计成通过向气体容纳槽中的气体容纳槽注入气体来旋转转子 转子通过在转子室的外周表面中开口的注入口。 基座旋转机构的旋转轴沿着反应器中的基座的轴线延伸，并且其一端固定在基座的顶壁上。 托盘旋转轴，其一端固定到分别设置在基座的外表面中的凹部中的每个托盘，其延伸穿过基座的周壁。 当驱动机构的旋转轴旋转时，由每个托盘支撑的晶片围绕旋转轴旋转。 固定在托盘旋转轴的另一端的齿轮与固定在转子的上表面并与驱动机构的旋转轴同轴定位的中空旋转部件的上端面上的齿圈啮合。 当转子旋转时，通过齿轮连接到中空旋转构件的盘旋转轴使每个托盘旋转，使得晶片围绕托盘旋转轴旋转。 因此，晶片的旋转速度和转速可以彼此独立地变化。

公开(公告)号：US06644069B2

公开(公告)日：2003-11-11

申请号：US09782152

申请日：2001-02-14

申请人： Yukio Kohmura ,  Masahide Kuwabara ,  Kiyoshi Arima ,  Yasuhiro Naka ,  Shinpei Todo

发明人： Yukio Kohmura ,  Masahide Kuwabara ,  Kiyoshi Arima ,  Yasuhiro Naka ,  Shinpei Todo

IPC分类号： C03D2100

CPC分类号： C03B37/01251 ,  C03B2205/47

摘要： An end heating and processing method of an optical fiber preform. In this method, an optical fiber preform is processed by heating and melting an end of a vitrified optical fiber preform including a core portion and a cladding portion formed on an outer circumference thereof to process the end having a shape for drawing as an optical fiber.

摘要翻译： 光纤预制件的端部加热和加工方法。 在该方法中，通过对形成在其外周上的芯部和包层部的玻璃化的光纤预制件的端部进行加热熔融来加工和熔化光纤预制体，以处理具有作为光纤的拉伸形状的端部。

公开(公告)号：US06519977B2

公开(公告)日：2003-02-18

申请号：US09810507

申请日：2001-03-19

申请人： Toshihiro Mikami ,  Yukio Kohmura

发明人： Toshihiro Mikami ,  Yukio Kohmura

IPC分类号： C03B37029

CPC分类号： C03B37/01486

摘要： An optical fiber preform suspending and supporting apparatus able to prevent deformation of a pin placed in a high temperature environment and able to support a porous optical fiber preform without adversely influencing supports of the pin and without causing inclination relative to the vertical line of a main shaft, wherein a movable connector is fitted into an enlarged-diameter portion of the lower end of a main shaft, this enlarged-diameter portion is connected with the movable connector by a pin so that the movable connector is able to swing around the pin, a holding portion including a supporting portion is formed integrally at the bottom of the movable connector to hold an enlarged-diameter portion of the upper end of a starting preform, and the diameter of the pin is in the range of 20% to 50% of the outside diameter of the enlarged-diameter portion of the lower end of the main shaft, and an optical fiber processing apparatus including the same.

摘要翻译： 一种光纤预制件悬挂和支撑装置，其能够防止放置在高温环境中的销的变形，并且能够支撑多孔光纤预制件而不会不利地影响销的支撑并且不会相对于主轴的垂直线引起倾斜 其特征在于，可动连接器嵌入主轴的下端部的扩径部，该扩径部通过销与活动连接器连接，能够使活动连接器能够在销周围摆动， 包括支撑部的保持部一体地形成在可动连接器的底部，以保持起始预制件的上端的扩径部分，并且销的直径在该直径部分的20％至50％的范围内 主轴下端的扩径部的外径和包括该主轴的下端的光纤加工装置。

公开(公告)号：US5548213A

公开(公告)日：1996-08-20

申请号：US120442

申请日：1993-09-14

申请人： Yukio Kohmura ,  Yoshinori Ishida ,  Takashi Hibino

发明人： Yukio Kohmura ,  Yoshinori Ishida ,  Takashi Hibino

IPC分类号： G01N27/02 ,  G01N27/72 ,  G01N27/90 ,  G01R33/12

CPC分类号： G01N27/9046 ,  G01B7/107 ,  G01N27/023 ,  G01N27/9026

摘要： A method and system for accurately inspecting an electroconductive film using an eddy current and a process and apparatus for production of an optical fiber which measures on-line the electrical resistance, which shows the state of formation of the electroconductive hermetic coating of the optical fiber by the electroconductive film inspection method and reflects back the measurement results to the hermetic coating forming conditions. Optical fiber is made up of a core, a cladding, an amorphous carbon film or other electroconductive hermetic coating formed on the outer surface of the cladding, and a protective coating. The electrical resistance of the hermetic coating generates an eddy current at the coating, the eddy current generated is detected, and the phase angle of the complex impedance is detected to enable calculation. In particular, to accurately detect the phase angle, the high frequency current for generating the eddy current is changed by a low frequency of about 1/100th of the high frequency to change the average intensity and obtain at least two points of measurement defining the above phase angle. The electrical resistance of the hermetic coating is calculated from this phase angle. The electrical resistance shows the state of formation of the hermetic coating. The measurement value of the electrical resistance of the hermetic coating is used for setting the hermetic coating production conditions. The electroconductive film inspection method of the present invention may also be used for quality control etc. of thin films.

摘要翻译： 用于使用涡流精确检查导电膜的方法和系统，以及测量在线电阻的光纤的制造方法和装置，其示出了通过光纤的导电密封涂层形成的状态 导电膜检查方法并将测量结果反映到气密涂层形成条件。 光纤由形成在包层的外表面上的芯，包层，无定形碳膜或其它导电气密性涂层以及保护涂层构成。 密封涂层的电阻在涂层处产生涡流，检测出产生的涡流，并检测复阻抗的相位角，以便计算。 特别是为了精确地检测相位角，用于产生涡电流的高频电流以高频的约+ E，fra 1/100 + EE th的低频率改变，以改变平均强度并获得至少 两个测量点定义了上述相位角。 从该相位角计算密封涂层的电阻。 电阻显示密封涂层的形成状态。 密封涂层的电阻的测量值用于设定气密涂层的生产条件。 本发明的导电膜检查方法也可以用于薄膜的质量控制等。

公开(公告)号：US5262726A

公开(公告)日：1993-11-16

申请号：US707744

申请日：1991-05-30

申请人： Yukio Kohmura ,  Yoshinori Ishida ,  Takashi Hibino

发明人： Yukio Kohmura ,  Yoshinori Ishida ,  Takashi Hibino

IPC分类号： G01N27/02 ,  G01N27/72 ,  G01N27/90 ,  G01R33/12

CPC分类号： G01N27/9046 ,  G01B7/107 ,  G01N27/023 ,  G01N27/9026

摘要： A method and system for accurately inspecting an electroconductive film using an eddy current and a process and apparatus for production of an optical fiber which measures on-line the electrical resistance, which shows the state of formation of the electroconductive hermetic coating of the optical fiber by the electroconductive film inspection method and reflects back the measurement results to the hermetic coating forming conditions are disclosed. Optical fiber is made up of a core, cladding, amorphous carbon film or other electroconductive hermetic coating formed on the outer surface of the cladding, and a protective coating. The electrical resistance of the hermetic coating generates an eddy current at the coating, the eddy current generated is detected, and the phase angle of the complex impedance is detected to enable calculation. In particular, to accurately detect the phase angle, the high frequency current for generating the eddy current is changes by a low frequency of about 1/100th of the high frequency to change the average intensity and obtain at least two points of measurement defining the above phase angle. The electrical resistance of the hermetic coating is calculated from this phase angle. The electrical resistance shows the state of formation of the hermetic coating. The measurement value of the electrical resistance of the hermetic coating is used for setting the hermetic coating production conditions. The electroconductive film inspection method of the present invention may also be used for quality control etc. of thin films.

公开(公告)号：US4991542A

公开(公告)日：1991-02-12

申请号：US368312

申请日：1989-06-12

申请人： Yukio Kohmura ,  Yoshinori Ishida ,  Takuya Nishimoto

发明人： Yukio Kohmura ,  Yoshinori Ishida ,  Takuya Nishimoto

IPC分类号： C23C16/509 ,  H01J37/32 ,  H01L21/00

CPC分类号： H01L21/67017 ,  C23C16/509 ,  H01J37/3244

摘要： With the method and apparatus for forming a thin film by plasma CVD according to this invention, a substrate is disposed between a pair of feed-gas supplying electrodes, and plasma is generated by applying a high frequency electric power to the substrate as an object to be processed. Feed gas is supplied from the feed-gas supplying electrodes into the plasma and is activated, whereby a film is formed on the substrate. Therefore, a solid and fine thin film which has corrosion-resistive and abrasion-resistive properties is formed on the substrate.

摘要翻译： PCT No.PCT / JP88 / 01043 Sec。 371日期1989年6月12日 根据本发明的通过等离子体CVD形成薄膜的方法和装置，在一对进料气体供给电极之间设置基板， 并且通过向作为待处理对象的基板施加高频电力来产生等离子体。 进料气体从进料气体供给电极供给到等离子体中并被活化，由此在基板上形成膜。 因此，在基板上形成具有耐腐蚀性和耐磨性的固体和细小薄膜。

公开(公告)号：US06748766B2

公开(公告)日：2004-06-15

申请号：US09842003

申请日：2001-04-26

申请人： Yukio Kohmura

发明人： Yukio Kohmura

IPC分类号： C03B1906

CPC分类号： C03B37/0146 ,  Y02P40/57

摘要： A porous preform vitrification apparatus of the present invention, provided with a means for forcibly feeding nitrogen etc. from a furnace core tube to a discharge gas pipe so as to balance a pressure between a furnace core tube accommodating a porous preform and a heating furnace body surrounding this and so as to suppress pressure fluctuation in the furnace core tube to a minimum level, controlling the gas feed rate and discharge rate to the furnace core tube and the heating furnace body, and controlling the feed rate of the nitrogen from the furnace core tube to the discharge gas pipe based on a differential pressure signal of a pressure in the furnace core tube and a pressure in the heating furnace body.

摘要翻译： 本发明的多孔预制玻璃化装置具有强制将氮气等从炉芯管输送到放电气体管道的装置，以平衡容纳多孔预成型体的炉芯管与加热炉体之间的压力 围绕这一点，以便将炉芯管中的压力波动抑制到最低水平，控制到炉芯管和加热炉体的气体进料速率和排出速率，并且控制来自炉芯的氮气的进料速率 基于炉芯管中的压力的​​差压信号和加热炉体中的压力来管排出气体管。

公开(公告)号：US06619074B1

公开(公告)日：2003-09-16

申请号：US09649576

申请日：2000-08-29

申请人： Hiroyuki Wada ,  Toshihiro Mikami ,  Akihiro Kanao ,  Yukio Kohmura

发明人： Hiroyuki Wada ,  Toshihiro Mikami ,  Akihiro Kanao ,  Yukio Kohmura

IPC分类号： C03B37018

CPC分类号： C03B37/01406 ,  C03B37/0144 ,  C03B2207/42 ,  C03B2207/50

摘要： An apparatus for the production of a porous optical fiber preform preventing cracks in the preform and stabilizing quality over the longitudinal direction. The apparatus includes a reaction portion, a feed port for introducing a stream of gas, and a main exhaust port. A rotating mechanism is provided for mounting, rotating, and pulling up a seed rod for forming the porous optical fiber preform. A first burner emits a flame carrying fine particles of glass forming the core portion, and a second burner emits a flame carrying fine particles of glass forming the cladding portion. A portion adjusts the flow of the stream from the feed port to the main exhaust port so that the flames carrying the glass particles are not disturbed by the stream and so that the stream does not directly contact a fine glass particle deposit formed at a bottom end of the seed rod.

摘要翻译： 一种用于制造多孔光纤预制件的装置，其防止预成型件中的裂纹并且在纵向上稳定质量。 该装置包括反应部分，用于引入气流的进料口和主排气口。 提供旋转机构用于安装，旋转和拉起用于形成多孔光纤预制棒的种棒。 第一燃烧器发射携带形成芯部的玻璃微粒的火焰，第二燃烧器发射承载形成包层部分的玻璃微小玻璃的火焰。 一部分调节从进料口到主排气口的流的流动，使得携带玻璃颗粒的火焰不会被流干扰，从而流不直接接触形成在底端的细玻璃颗粒沉积物 的种子棒。

公开(公告)号：US5672193A

公开(公告)日：1997-09-30

申请号：US558224

申请日：1995-11-17

申请人： Yukio Kohmura ,  Yoshinori Ishida ,  Takashi Hibino

发明人： Yukio Kohmura ,  Yoshinori Ishida ,  Takashi Hibino

IPC分类号： G01N27/02 ,  G01N27/72 ,  G01N27/90 ,  C03B37/023

CPC分类号： G01N27/9046 ,  G01B7/107 ,  G01N27/023 ,  G01N27/9026

摘要： An apparatus for accurately inspecting an electroconductive film using an eddy current and an apparatus for production of an optical fiber which measures on-line the electrical resistance, which shows the state of formation of the electroconductive hermetic coating of the optical fiber by an electroconductive film inspection method and reflects back the measurement results to the hermetic coating forming conditions. Optical fiber is made up of a core, a cladding, amorphous carbon film or other electroconductive hermetic coating formed on the outer surface of the cladding, and a protective coating. The electrical resistance of the hermetic coating generates an eddy current at the coating, the eddy current generated is detected, and the phase angle of the complex impedance is detected to enable calculation. In particular, to accurately detect the phase angle, the high frequency current for generating the eddy current is changed by a low frequency of about 1/100th of the high frequency to change the average intensity and obtain at least two points of measurement defining the above phase angle. The electrical resistance of the hermetic coating is calculated from this phase angle. The electrical resistance shows the state of formation of the hermetic coating. The measurement value of the electrical resistance of the hermetic coating is used for setting the hermetic coating production conditions. The electroconductive film inspection method of the present invention may also be used for quality control etc. of thin films.

摘要翻译： 使用涡电流精确检查导电膜的装置和测量在线电阻的光纤的制造装置，其示出通过导电膜检查形成光纤的导电气密性涂层的状态 方法，并将测量结果反映到气密涂层形成条件。 光纤由形成在包层的外表面上的芯，包层，无定形碳膜或其它导电气密性涂层和保护涂层组成。 密封涂层的电阻在涂层处产生涡流，检测出产生的涡流，并检测复阻抗的相位角，以便计算。 特别是为了精确地检测相位角，用于产生涡电流的高频电流以高频的约+ E，fra 1/100 + EE th的低频率改变，以改变平均强度并获得至少 两个测量点定义了上述相位角。 从该相位角计算密封涂层的电阻。 电阻显示密封涂层的形成状态。 密封涂层的电阻的测量值用于设定气密涂层的生产条件。 本发明的导电膜检查方法也可以用于薄膜的质量控制等。

公开(公告)号：US5183490A

公开(公告)日：1993-02-02

申请号：US761004

申请日：1991-09-17

申请人： Toshihiro Mikami ,  Yukio Kohmura ,  Yoshinori Ishida ,  Akira Nogami

发明人： Toshihiro Mikami ,  Yukio Kohmura ,  Yoshinori Ishida ,  Akira Nogami

IPC分类号： C03B37/014

CPC分类号： C03B37/014 ,  C03B37/01486 ,  Y02P40/57

摘要： An optical fiber soot synthesis apparatus which synthesizes around a fiber starting member forming a core of an optical fiber an optical fiber soot forming a cladding and which accurately calculates in real time the mass of the optical fiber soot when deposited so as to control the synthesis of the optical fiber soot. The optical fiber soot synthesis apparatus measures the weight of the rotating fiber starting member and optical fiber soot by a pair of soot weight detection sensors arranged at a fiber starting member support and rotational drive mechanisms divided so as to prevent the weight of the rotational drive mechanisms from having much of an effect. The computation and control apparatus performs operational processing from the measured weights and calculates the mass of only the optical fiber soot synthesized on the fiber starting member in real time. The computation and calculation apparatus refers to the calculated mass to control the synthesis of the optical fiber soot.