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1.发明申请Cleaning Member, Carrying Member with Cleaning Function, and Method of Cleaning Substrate Processing Equipment 审中-公开清洁部件，带清洁功能的携带部件以及清洗基板加工设备的方法公开(公告)号：US20100170533A1
公开(公告)日：2010-07-08
申请号：US12377052
申请日：2007-06-26
申请人： Yoshio Terada , Yuki Sugo , Yoshinori Yoshida , Youhei Maeno
发明人： Yoshio Terada , Yuki Sugo , Yoshinori Yoshida , Youhei Maeno
CPC分类号： B08B1/00 , B08B7/0028 , B82Y30/00 , B82Y40/00 , C01B32/16 , C01B2202/08 , C01B2202/34 , C01B2202/36
摘要： Provided is a cleaning member capable of removing minute foreign matter, in particular foreign matter of a submicron level simply, exactly, and sufficiently without contaminating a cleaning site. Further provided is a carrying member provided with a cleaning function having the cleaning member and a method of cleaning a substrate processing equipment with the use of the cleaning member or the carrying member provided with a cleaning function. The cleaning member includes a layer member having a plurality of protrusions of a columnar structure on a surface, in which each of the protrusions of a columnar structure has a carbon-based nanostructure.
摘要翻译： 本发明提供一种清洁部件，其能够简单，准确，充分地除去微小的异物，特别是亚微米级的异物，而不污染清洁部位。 还提供了具有清洁功能的承载构件，其具有清洁构件，以及使用具有清洁功能的清洁构件或承载构件来清洁衬底处理设备的方法。 清洁部件包括在表面上具有多个柱状结构的突起的层部件，其中柱状结构的每个突起具有碳基纳米结构。
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2.发明申请Cleaning Member, Delivery Member with Cleaning Function, and Method of Cleaning Substrate Processing Apparatus 审中-公开清洁部件，具有清洁功能的输送部件以及清洁基板处理装置的方法公开(公告)号：US20100175716A1
公开(公告)日：2010-07-15
申请号：US12377063
申请日：2007-06-28
申请人： Yuki Sugo , Yoshio Terada , Daisuke Uenda , Makoto Namikawa , Yoshinori Yoshida , Youhei Maeno
发明人： Yuki Sugo , Yoshio Terada , Daisuke Uenda , Makoto Namikawa , Yoshinori Yoshida , Youhei Maeno
CPC分类号： H01L21/67046 , B08B1/00 , B08B7/0028 , C23C16/4407
摘要： Provided is a cleaning member, which is capable of removing minute foreign matter, preferably foreign matter of a submicron level simply, exactly, and sufficiently, without contaminating a cleaning site. Further provided is a delivery member with a cleaning function having the cleaning member and a method of cleaning a substrate processing apparatus using the delivery member with a cleaning function. The cleaning member of the present invention includes a cleaning layer having a plurality of protrusions of a columnar structure on the surface, in which an aspect ratio of the protrusions of a columnar structure is 5 or more.
摘要翻译： 本发明提供一种清洁部件，其能够简单，准确且充分地除去微小的异物，优选亚微米级的异物，而不会污染清洁部位。 还提供具有清洁功能的传送部件，其具有清洁部件，以及使用具有清洁功能的传送部件清洁基板处理设备的方法。 本发明的清洁部件具有在柱面结构的突起长宽比为5以上的表面上具有多个柱状结构的突起的清洗层。
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公开(公告)号：US08227080B2
公开(公告)日：2012-07-24
申请号：US13058236
申请日：2009-06-19
申请人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
发明人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
IPC分类号： B32B7/12
CPC分类号： H01B1/04 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B2202/04 , C01B2202/20 , H01B1/24 , Y10S977/742 , Y10S977/752 , Y10S977/753 , Y10T428/26 , Y10T428/28 , Y10T428/2913 , Y10T428/2973 , Y10T428/2975
摘要： Provided is a composite material useful as a material for a thermal contact surface in a microprocessor which can express extremely high thermal diffusion property and extremely high conductivity, can express a sufficient adhesive strength in its surface, and is excellent in reworking property at the time of a bonding operation. The carbon nanotube aggregate of the present invention is a carbon nanotube aggregate where a plurality of carbon nanotubes each having a plurality of walls penetrate a resin layer in a thickness direction of the resin layer, in which both terminals of the carbon nanotube aggregate each have a shear adhesive strength for glass at 25° C. of 15 N/cm2 or more.
摘要翻译： 本发明提供一种复合材料，其可用作微处理器中的热接触表面的材料，其能够表现出极高的热扩散性和极高的导电性，能够在其表面上表现出足够的粘合强度，并且在工作性能方面优异 接合操作。 本发明的碳纳米管集合体是碳纳米管集合体，其中，具有多个壁的多个碳纳米管沿着树脂层的厚度方向贯穿树脂层，其中碳纳米管集合体的两端均具有 25℃下玻璃的剪切粘合强度为15N / cm 2以上。
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4.发明授权公开(公告)号：US08025971B2
公开(公告)日：2011-09-27
申请号：US12937681
申请日：2009-03-31
申请人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
发明人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
IPC分类号： D02G3/00
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/16 , C01B2202/04 , C01B2202/06 , C01B2202/08 , C01B2202/20 , C01B2202/34 , C09J7/00 , C09J2201/626 , Y10S977/742 , Y10S977/752 , Y10T428/249924 , Y10T428/26 , Y10T428/2913 , Y10T428/2918 , Y10T428/2973 , Y10T428/2975
摘要： A fibrous columnar structure aggregate having excellent mechanical properties, heat resistance, a high specific surface area, excellent pressure-sensitive adhesive property under temperature conditions ranging from room temperature to a high temperature, and/or such pressure-sensitive adhesive property that the adhesive strength for adherents different from each other in surface free energy does not change. A pressure-sensitive adhesive member the fibrous columnar structure aggregates. A fibrous columnar structure aggregate (1) includes fibrous columnar structures having a plurality of diameters, in which: the fibrous columnar structures having a plurality of diameters include fibrous columnar structures each having a length of 500 μm or more; and the mode of the diameter distribution of the fibrous columnar structures having a plurality of diameters is present at 15 nm or less, and the relative frequency of the mode of the diameter distribution is 30% or more.
摘要翻译： 具有优异的机械性能，耐热性，高比表面积，在室温至高温的温度条件下具有优异的压敏粘合性的纤维状柱状结构体聚集体和/或粘合强度 对于表面自由能彼此不同的粘附剂不会改变。 纤维状柱状结构聚集的压敏粘合剂构件。 纤维状柱状结构体聚集体（1）包括具有多个直径的纤维状柱状结构体，其中：具有多个直径的纤维状柱状结构包括长度为500μm以上的纤维状柱状结构体; 具有多个直径的纤维状柱状结构体的直径分布的形态为15nm以下，直径分布的相对频率为30％以上。
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公开(公告)号：US20110133135A1
公开(公告)日：2011-06-09
申请号：US13058236
申请日：2009-06-19
申请人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
发明人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
IPC分类号： H01B1/24
CPC分类号： H01B1/04 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B2202/04 , C01B2202/20 , H01B1/24 , Y10S977/742 , Y10S977/752 , Y10S977/753 , Y10T428/26 , Y10T428/28 , Y10T428/2913 , Y10T428/2973 , Y10T428/2975
摘要： Provided is a composite material useful as a material for a thermal contact surface in a microprocessor which can express extremely high thermal diffusion property and extremely high conductivity, can express a sufficient adhesive strength in its surface, and is excellent in reworking property at the time of a bonding operation. The carbon nanotube aggregate of the present invention is a carbon nanotube aggregate where a plurality of carbon nanotubes each having a plurality of walls penetrate a resin layer in a thickness direction of the resin layer, in which both terminals of the carbon nanotube aggregate each have a shear adhesive strength for glass at 25° C. of 15 N/cm2 or more.
摘要翻译： 本发明提供一种复合材料，其可用作微处理器中的热接触表面的材料，其能够表现出极高的热扩散性和极高的导电性，能够在其表面上表现出足够的粘合强度，并且在工作性能方面优异 接合操作。 本发明的碳纳米管集合体是碳纳米管集合体，其中，具有多个壁的多个碳纳米管沿着树脂层的厚度方向贯穿树脂层，其中碳纳米管集合体的两端均具有 25℃下玻璃的剪切粘合强度为15N / cm 2以上。
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6.发明申请公开(公告)号：US20110039095A1
公开(公告)日：2011-02-17
申请号：US12988268
申请日：2009-03-31
申请人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
发明人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
CPC分类号： B81B1/00 , B81B2203/0361 , B81C1/00206 , C09J7/00 , C09J2201/626 , Y10S977/742 , Y10S977/752 , Y10T428/249921 , Y10T428/26 , Y10T428/2913 , Y10T428/2918 , Y10T428/2973 , Y10T428/2975 , Y10T428/298
摘要： Provided is a fibrous columnar structure aggregate having excellent mechanical properties, a high specific surface area, and excellent pressure-sensitive adhesive property. Provided is a fibrous columnar structure aggregate having excellent heat resistance, a high specific surface area, and excellent pressure-sensitive adhesive properties under temperature conditions ranging from room temperature to a high temperature. Provided is a fibrous columnar structure aggregate having a high specific surface area and such pressure-sensitive adhesive property that its adhesive strength for adherends different from each other in surface free energy does not change (the aggregate is free of adherend selectivity). Provided is a pressure-sensitive adhesive member using any such fibrous columnar structure aggregate. A fibrous columnar structure aggregate (1) of the present invention includes fibrous columnar structures having a plurality of diameters, in which the distribution width of the diameter distribution of the fibrous columnar structures having the plurality of diameters is 10 nm or more, and the relative frequency of the mode of the diameter distribution is 30% or less.
摘要翻译： 提供一种具有优异的机械性能，高比表面积和优异的压敏粘合性能的纤维状柱状结构体骨料。 提供一种在室温至高温的温度条件下具有优异的耐热性，高比表面积和优异的压敏粘合剂性能的纤维状柱状结构体聚集体。 本发明提供一种具有高比表面积的纤维状柱状结构体聚集体和其表面自由能彼此不同的被粘物的粘合强度不受变化的粘合性（聚集体无粘附选择性）。 提供使用任何这种纤维状柱状结构体聚集体的压敏粘合剂构件。 本发明的纤维状柱状结构体聚集体（1）包括具有多个直径的纤维状柱状结构体，其中具有多个直径的纤维状柱状结构的直径分布的分布宽度为10nm以上， 直径分布模式的频率为30％以下。
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7.发明授权公开(公告)号：US09550677B2
公开(公告)日：2017-01-24
申请号：US13518274
申请日：2010-09-01
申请人： Youhei Maeno
发明人： Youhei Maeno
CPC分类号： C01B31/0226 , B82Y30/00 , B82Y40/00 , C01B32/16 , Y10T428/23979 , Y10T428/23993
摘要： Provided is a carbon nanotube composite structural body including, on a base material, a plurality of carbon nanotube columnar structural bodies, the carbon nanotube composite structural body having an extremely high adhesion strength between the base material and the carbon nanotube columnar structural bodies. Also provided is a pressure-sensitive adhesive member including such carbon nanotube composite structural body. The carbon nanotube composite structural body of the present invention is a carbon nanotube composite structural body, including, on a base material, a plurality of carbon nanotube columnar structural bodies, in which: the carbon nanotube composite structural body further includes an intermediate layer between the base material and the carbon nanotube columnar structural bodies; the intermediate layer has a thickness of 1.0 nm or more and less than 10 nm; and an adhesion strength between the base material with the intermediate layer and the carbon nanotube columnar structural bodies is 5 N/cm2 or more.
摘要翻译： 提供一种碳纳米管复合结构体，其在基材上具有多个碳纳米管柱状结构体，所述碳纳米管复合结构体在所述基材和所述碳纳米管柱状结构体之间具有极高的粘合强度。 还提供了包括这种碳纳米管复合结构体的压敏粘合剂构件。 本发明的碳纳米管复合结构体是碳纳米管复合结构体，其在基材上包含多个碳纳米管柱状结构体，其中：所述碳纳米管复合结构体还包含在所述碳纳米管复合结构体之间的中间层 基体材料和碳纳米管柱状结构体; 中间层的厚度为1.0nm以上且小于10nm; 基材与中间层和碳纳米管柱状结构体之间的粘合强度为5N / cm 2以上。
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公开(公告)号：US20130059110A1
公开(公告)日：2013-03-07
申请号：US13698081
申请日：2011-06-28
申请人： Youhei Maeno
发明人： Youhei Maeno
CPC分类号： B82Y30/00 , B82Y40/00 , C01B32/158 , C01B2202/08 , C01B2202/34 , C01B2202/36 , C09J7/20 , C09J2201/606 , C09J2201/622 , Y10T428/23986
摘要： Provided is a fibrous columnar structure aggregate having a high shear adhesive strength. Also provided is a pressure-sensitive adhesive member using such fibrous columnar structure aggregate. The fibrous columnar structure aggregate is a fibrous columnar structure aggregate, including a plurality of fibrous columnar structures, in which the fibrous columnar structures each have a surface provided with a surface coating layer formed of a coating material having a Hamaker constant of 10×10−20 J or more.
摘要翻译： 提供具有高剪切粘合强度的纤维状柱状结构体聚集体。 还提供了使用这种纤维状柱状结构体聚集体的压敏粘合剂构件。 所述纤维状柱状结构体是具有多个纤维状柱状结构体的纤维状柱状结构集合体，其中，所述纤维状柱状结构体各自具有表面被覆层，所述表面涂层由Hamaker常数为10×10〜 20 J以上。
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9.发明授权公开(公告)号：US08900701B2
公开(公告)日：2014-12-02
申请号：US12988268
申请日：2009-03-31
申请人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
发明人： Youhei Maeno , Yoshikazu Nakayama , Kaori Hirahara
CPC分类号： B81B1/00 , B81B2203/0361 , B81C1/00206 , C09J7/00 , C09J2201/626 , Y10S977/742 , Y10S977/752 , Y10T428/249921 , Y10T428/26 , Y10T428/2913 , Y10T428/2918 , Y10T428/2973 , Y10T428/2975 , Y10T428/298
摘要： A fibrous columnar structure aggregate having excellent mechanical properties, a high specific surface area, excellent heat resistance, excellent pressure-sensitive adhesive properties under temperature conditions ranging from room temperature to a high temperature, and such pressure-sensitive adhesive property that its adhesive strength for adherends different from each other in surface free energy does not change (the aggregate is free of adherend selectivity). The fibrous columnar structure aggregate (1) includes fibrous columnar structures having a plurality of diameters, in which the distribution width of the diameter distribution of the fibrous columnar structures having the plurality of diameters is 10 nm or more, and the relative frequency of the mode of the diameter distribution is 30% or less.
摘要翻译： 具有优异的机械性能，高比表面积，优异的耐热性，在室温至高温的温度条件下的优异的压敏粘合剂性能的纤维状柱状结构体聚集体以及其粘合强度 表面自由能彼此不同的被粘物不变（聚集体不含粘附体选择性）。 纤维状柱状结构体聚集体（1）包括多个直径的纤维状柱状结构体，其中具有多个直径的纤维状柱状结构的直径分布的分布宽度为10nm以上， 的直径分布为30％以下。
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公开(公告)号：US20140170368A1
公开(公告)日：2014-06-19
申请号：US14130149
申请日：2012-05-30
申请人： Youhei Maeno
发明人： Youhei Maeno
IPC分类号： C09J7/02
CPC分类号： C01B32/16 , B82Y30/00 , B82Y40/00 , C01B2202/04 , C01B2202/34 , C09J7/00 , C09J2201/626 , C09J2400/00 , D04H1/4242 , D04H1/76 , Y10T428/23979 , Y10T428/23986
摘要： Provided is a fibrous columnar structure aggregate including a plurality of fibrous columnar structures on a surface of a substrate, the fibrous columnar structure aggregate having an extremely high adhesion strength between the substrate and the fibrous columnar structures. A fibrous columnar structure aggregate (10) is a fibrous columnar structure aggregate including: a substrate (1); and a plurality of fibrous columnar structures (2) provided on a surface of the substrate, in which: one end (2a) of each of the plurality of fibrous columnar structures is adhered to the surface of the substrate; and an adhesion strength between the plurality of fibrous columnar structures and the surface of the substrate is 25 N/cm2 or more at 25° C.
摘要翻译： 提供了一种在基材表面上包括多个纤维状柱状结构的纤维状柱状结构体聚集体，所述纤维状柱状结构体聚集体在基材和纤维状柱状结构之间具有极高的粘合强度。 纤维状柱状结构体聚集体（10）是包括：基材（1）的纤维状柱状结构体聚集体。 以及设置在所述基板的表面上的多个纤维状柱状结构体（2），其中，所述多个纤维状柱状结构体的一端部（2a）粘附于所述基板的表面; 并且多个纤维状柱状结构体与基板表面的粘合强度在25℃为25N / cm 2以上
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