发明申请
US20100175716A1 Cleaning Member, Delivery Member with Cleaning Function, and Method of Cleaning Substrate Processing Apparatus
审中-公开
清洁部件，具有清洁功能的输送部件以及清洁基板处理装置的方法
- 专利标题： Cleaning Member, Delivery Member with Cleaning Function, and Method of Cleaning Substrate Processing Apparatus
- 专利标题（中）： 清洁部件，具有清洁功能的输送部件以及清洁基板处理装置的方法
-
申请号： US12377063申请日： 2007-06-28
-
公开(公告)号： US20100175716A1公开(公告)日： 2010-07-15
- 发明人: Yuki Sugo , Yoshio Terada , Daisuke Uenda , Makoto Namikawa , Yoshinori Yoshida , Youhei Maeno
- 申请人： Yuki Sugo , Yoshio Terada , Daisuke Uenda , Makoto Namikawa , Yoshinori Yoshida , Youhei Maeno
- 申请人地址： JP Ibaraki-shi
- 专利权人： NITTO DENKO CORPORATION
- 当前专利权人： NITTO DENKO CORPORATION
- 当前专利权人地址： JP Ibaraki-shi
- 优先权： JP2006-219435 20060811
- 国际申请： PCT/JP2007/062975 WO 20070628
- 主分类号： B08B7/02
- IPC分类号： B08B7/02 ; A46D1/00
摘要：
Provided is a cleaning member, which is capable of removing minute foreign matter, preferably foreign matter of a submicron level simply, exactly, and sufficiently, without contaminating a cleaning site. Further provided is a delivery member with a cleaning function having the cleaning member and a method of cleaning a substrate processing apparatus using the delivery member with a cleaning function. The cleaning member of the present invention includes a cleaning layer having a plurality of protrusions of a columnar structure on the surface, in which an aspect ratio of the protrusions of a columnar structure is 5 or more.
信息查询
IPC分类:
