公开(公告)号：US20010023523A1

公开(公告)日：2001-09-27

申请号：US09863637

申请日：2001-05-23

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Jingkuang Chen ,  Feixia Pan

IPC: H04R017/00 ,  B23P017/00

CPC classification number: H04R17/00 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2002/041 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49156 ,  Y10T29/49401

Abstract: A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.

Abstract translation: 公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。 此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。 还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。