公开(公告)号：US20240369864A1

公开(公告)日：2024-11-07

申请号：US18143846

申请日：2023-05-05

Applicant: XILINX, INC.

Inventor： Chuan XIE ,  Mayank RAJ ,  Anish JOSHI ,  Zakriya MOHAMMED ,  Gareeyasee SAHA ,  Parag UPADHYAYA ,  Yohan FRANS

IPC: G02F1/025 ,  G02F1/01

Abstract: A silicon-on-insulator (SOI) dense-wavelength-division-multiplexing (DWDM) device includes micro-ring modulators (MRMs) having radii under 5 micrometers. A 16-channel embodiment may provide a free spectral range of 3.2 THz, 200 GHz channel spacing, 41 GHz bandwidth, and a Q factor of 4500. PN junctions of rib ring waveguides (RWRs) may be perpendicular or parallel with a plane of the RWRs. On-chip inductive components may be used to match reactances of the PN junctions. The RWRs may be relatively wide and a rib bus waveguide may be relatively narrow (e.g., narrower than the RWRs). MRM outer slaps may be wider than inner slabs. Regions inside and outside of the RWRs, including slabs at optical coupling gaps may be doped to improve modulation efficiency. Regions of the rib bus waveguide distant from the optical coupling gaps may be undoped. Cavities may be provided below the MRMs and associated heater elements.