公开(公告)号：US20040184709A1

公开(公告)日：2004-09-23

申请号：US10712200

申请日：2003-11-12

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC: G02B006/26

CPC classification number: G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US20040184710A1

公开(公告)日：2004-09-23

申请号：US10712203

申请日：2003-11-12

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC: G02B006/26

CPC classification number: G02B6/358 ,  G02B6/3508 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B2006/12145

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重构光插座多路复用器（ROADM）。

公开(公告)号：US20040114856A1

公开(公告)日：2004-06-17

申请号：US10721849

申请日：2003-11-25

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Pinyen Lin ,  Jingkuang Chen ,  Yi Su

IPC: G02B006/26

CPC classification number: G02B6/356 ,  G02B6/12021 ,  G02B6/12033 ,  G02B6/2938 ,  G02B6/3508 ,  G02B6/3512 ,  G02B6/3584 ,  G02B6/3596 ,  G02B2006/12061 ,  G02B2006/12097 ,  G02B2006/12107 ,  G02B2006/12145 ,  G02B2006/12164

Abstract: A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithicaily integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.

Abstract translation: 硅解复用器，多个硅开关和硅复用器整体地集成在单个硅芯片上。 在实施例中，硅解复用器和硅多路复用器各自包括衍射光栅。 在其他实施例中，硅解复用器和硅多路复用器均包括阵列波导光栅。 在各种示例性实施例中，硅光开关包括光开关，微机械扭转镜，静电微镜和/或倾斜微镜。 在使用中，包括复用数据流的光信号被输入到单片可重构光复用器。 可以输出包括修改的多路复用数据流的光信号。 在光通信系统中，硅解复用器与输入光纤通信，多个硅光开关在硅解复用器和硅多路复用器之间通信，并且硅复用器与输出光纤通信。 在各种实施例中，光开关被制造成自对准。

公开(公告)号：US20030086641A1

公开(公告)日：2003-05-08

申请号：US09986395

申请日：2001-11-08

Applicant: XEROX CORPORATION

Inventor： Joel A. Kubby ,  Pinyen Lin ,  Jingkuang Chen ,  Yi Su

IPC: G02B006/293 ,  G02B006/12 ,  G02B006/35

CPC classification number: G02B6/356 ,  G02B6/12021 ,  G02B6/12033 ,  G02B6/2938 ,  G02B6/3508 ,  G02B6/3512 ,  G02B6/3584 ,  G02B6/3596 ,  G02B2006/12061 ,  G02B2006/12097 ,  G02B2006/12107 ,  G02B2006/12145 ,  G02B2006/12164

Abstract: A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.