公开(公告)号：US20180097191A1

公开(公告)日：2018-04-05

申请号：US15126584

申请日：2016-04-01

Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Xuanyun WANG

IPC: H01L51/05 ,  H01L27/32 ,  H01L21/205 ,  H01L21/3065 ,  H01L29/16 ,  H01L29/786 ,  H01B1/24

CPC classification number: H01L51/0558 ,  H01B1/24 ,  H01L21/205 ,  H01L21/3065 ,  H01L27/32 ,  H01L29/16 ,  H01L29/1606 ,  H01L29/66045 ,  H01L29/786 ,  H01L29/78684 ,  H01L51/0512

Abstract: The present invention provides a method for manufacturing a graphene thin-film transistor, which includes: depositing a graphene layer on a surface of a copper foil; depositing a metal layer on a surface of the graphene layer; attaching a support layer to a surface of the metal layer to form a graphene film; placing the graphene film in a copper etching solution until the copper foil is dissolved completely, then transferring the graphene film to a target substrate, and removing the support layer; defining patterns of a source and a drain on the surface of the metal layer, manufacturing a source electrode and a drain electrode, and manufacturing a gate electrode on a target substrate.

公开(公告)号：US20180294314A1

公开(公告)日：2018-10-11

申请号：US15541471

申请日：2017-05-16

Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Zhe LIU ,  Xuanyun WANG

IPC: H01L27/28 ,  H01L27/12 ,  H01L51/56 ,  H01L27/32

Abstract: The invention provides a manufacturing method for complementary TFT device. The manufacturing method for complementary TFT device uses a solution method to continuously form a metal oxide semiconductor TFT and an organic semiconductor TFT; the metal oxide semiconductor TFT and the organic semiconductor TFT are electrically connected, and one of the metal oxide semiconductor TFT and the organic semiconductor TFT is an N-type channel TFT, and the other is a P-type channel TFT. The method can reduce the use of vacuum apparatus and high temperature apparatus, and explore the advantages of the solution method to realize large area and low-cost to reduce production costs and increase product competitiveness. The invention also provides a manufacturing method for OLED display panel, able to reduce production cost and increase product competitiveness.