公开(公告)号：US20190091719A1

公开(公告)日：2019-03-28

申请号：US15749204

申请日：2017-11-25

Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.

Inventor： Dongpo JIA ,  Fan WEI

IPC: B05C11/10 ,  B05C5/02 ,  B05D1/02 ,  B05D1/32

Abstract: Disclosed is a developing device for developing a substrate, comprising: a developing tank, a recovery box and a conveying unit provided right above the developing tank and configured to convey the substrate; wherein the developing tank comprises a first tank, a second tank and a third tank, which are spaced and are sequentially arranged; the recovery box comprises a first box and a second box; the first tank is communicated with the first box; as the substrate is arranged in the second tank, the second tank is communicated with the first box; as the substrate is arranged in the third tank, the third tank is communicated with the second box. The developing device can solve the technical problems of separately recovering the developers doped with different photoresist concentrations during the development of the substrate to reduce the cost of diluting the developer concentration in the recovery box.

公开(公告)号：US20190119156A1

公开(公告)日：2019-04-25

申请号：US15740941

申请日：2017-11-01

Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Fan WEI

IPC: C03C23/00 ,  C03B32/00 ,  C03B35/16 ,  C03B35/24 ,  C03C17/00

Abstract: The invention discloses a method and an apparatus for drying and cooling a glass substrate. The method comprises the steps described below. The method delivers the glass substrate cleaned by a cleaner into a baking oven by a first roller device. It dries the glass substrate using an infrared heating plate installed in the baking oven. It delivers the dried glass substrate into a cooling chamber by a second roller device. It cools the dried glass substrate using a cooling plate installed in the cooling chamber. And it delivers the cooled glass substrate onto a platform of an air floating type coater, and coating the glass substrate. This invention also discloses an apparatus corresponding to the method. According to the embodiments of the present invention, it is possible to reduce the number of foreign particles on the glass substrate before coating, and the drying effect is excellent.