公开(公告)号：US20230015174A1

公开(公告)日：2023-01-19

申请号：US17891342

申请日：2022-08-19

Applicant: University of Science and Technology Beijing

Inventor： Xiaolu Pang ,  Tao Guo ,  Kewei Gao

IPC: C23C14/34 ,  C23C14/06 ,  C23C14/00 ,  C30B29/38 ,  C30B25/06 ,  C30B25/18 ,  C01B21/06

Abstract: In a general aspect, a ceramic thin film with nanotwinned regions at a tunable volume fraction is manufactured. In some aspects, a method for manufacturing a ceramic thin film on a surface of a substrate in an evacuated chamber is disclosed. The ceramic thin film includes crystalline grains; and each of the crystalline grains includes one or more nanotwinned regions. The one or more nanotwinned regions have a volume fraction in a range of 30-80% of the ceramic thin film. The ceramic thin film comprises titanium, nitrogen, and boron. A plurality of targets including a plurality of sputtering materials is prepared. A gas atmosphere in the evacuated chamber is formed. Electric power is supplied to the plurality of targets to cause co-sputtering of the plurality of sputtering materials to form the ceramic thin film with the one or more nanotwinned regions.